Table of Contents 6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !
1 Drain q r e w t i u y o !0 !
Symbol Description Power supply ON 1 1 1 1 Intermediate 1 q Intermediate 2 q Intermediate 3 q Motor side End side A B C D E MIDDLE Indicator light (Green) q q q 2 MOTOR Indicator light (Green) q q q END Indicator light (Green) q q q q q q q q PWR Indicator light (Green) q ALM Indicator light (Red) q indicates on status, and indicates off status. 1) Displays for the 5-point stoppable type
0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.
73.5 55.5 Rc 1/4 NPT 1/4 17.6 15 20 64 86 7 17 18 50 Q R Bore size (mm) S Th9 U Z Note 1) For 125 to 200 stroke, strokes are by the 25 mm interval.
Q Q Q 25 Q Q Series VQZ Base Mounted Type Construction VQZ100 Poppet type N.C.
entry Size Port size Faston DIN terminal Conduit terminal Conduit P type Q R S Q R S T Q R Q R 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 64.5 67 69.5 69.5 34 45 50 53 52.5 55 57.5 57.5 99.5 102 104.5 104.5 36 47 52 55 68.5 71 73.5 73.5 77 91 96 47.5 50 52.5 52.5 36 47 52 55 23 25.5 28 28 42 53.5 58 61 3 1/2 101.5 23 Series VX2 For Air mm Dimensions/Body Material: Resin Y Y Grommet (with surge voltage
Model combination Combination Air filter q q q Symbol Filter regulator q q Mist separator w w Regulator w w e Lubricator e w Nil A B C D 20 Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessories Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 22 through 27 Mist
(mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) C D E H J K L M N A B F 5.5 P M5 x 0.8 Q 11.5 A B F P Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 33 7.5 1/8 10.5 13 16 45 M8 x 1.25 4.5 14 7 34 5.5 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 46.5 39.5 8 1/8 11 13 16 52 M8 x 1.25 5 14 7 40 5.5 8 1/8 11 50 48.5 40.5 10.5 1/4
1 Drain q r e w t i u y o !0 !
3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !
polyurethane tubing Barb fitting U4 For 4 soft tubing U6 For 6 soft tubing 5 E E A10 M10 x 1 A12 M12 x 1 A B F Model A B C2 D E F Vacuum inlet direction q Pad dia.
1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.
25 61 (67) 76 (84) 81 (89) 86.5 30 35 40 40 9.5 12 12 15 20 22 24.5 24.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 Electrical entry Grommet Grommet (with surge voltage suppressor) Port size P Size Conduit terminal DIN terminal S R 1 2 Q 42 (47.5) 53.5 (61.5) 58 (66) 61 R 30 32.5 35 35 Q R 64.5 67 69.5 69.5 Q R Q 52.5 55 57.5 57.5 S T 99.5 102 104.5 104.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 28.5 (34) 39.5
Case Replacement Parts q Gasket for cover case AL-204H AL-205H ZFA100 Part no. ZFA200 No. Description Selection Warning 1.
0 o 102 0.2 2-1 132 q 134 O-ring Part No.
8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !
N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
Model Port size Q M B B A B C D P E F G H J K L 8, 1 4 1 AFM2000 AFM3000 AFM4000 AFM4000-06 40 53 70 75 97.5 129 165 169 11 14 18 20 40 53 70 70 40 56 73 73 17 16 17 14 30 41 50 50 27 40 54 54 22 23 26 25 5.4 6.5 8.5 8.5 8.4 8 10.5 10.5 40 53 70 70 2.3 2.3 2.3 2.3 120.5 4, 1 8 3 170 206 210 4 3 2 1 4, 1 8, 3 AFM2000 AFM3000 SAC2000, #1 SAC2503, #1 AFM4000 AFM4000-06 SAC4000, #1 SAC4006, #1
9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !