Max. Suction Flow Rate: Max. Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F04 [Vacuum: 2 x G1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking

Model: 1.8 m³/min, Input/Output: NPN, Input/Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: -, Filter: -

Model: 4.4 m³/min, Input/Output: NPN, Input/Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: -, Filter: -

Size: 20, Sensor: -, AC Adapter: -, Option: -

Size: 40, Sensor: -, AC Adapter: -, Option: -

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø6; Vacuum (V) Port: ø12, Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: None, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: None, Output Specifications: PNP Open Collector 2 Outputs,

Supply(P),Vacuum(V), One-touch Fitting: Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2", Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: None, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: None, Output Specifications: PNP Open Collector 2 Outputs

Input/Output Specification: NPN 5 Outputs + Auto-shift Input, Unit Specification: w/Unit Selection Function, Mounting: Panel Mount Adapter + Front Protection Cover, Sensor Connector: -, Power Supply: -, Output Specification: -

Input/Output Specification: PNP 5 Outputs + Auto-shift Input, Unit Specification: w/Unit Selection Function, Mounting: Panel Mount Adapter + Front Protection Cover, Sensor Connector: -, Power Supply: -, Output Specification: -

Input/Output Specification: 3 [IO-Link + PNP 4 Outputs or PNP 5 Outputs (SIO Mode)], Unit Specification: w/Unit Selection Function, Mounting: Panel Mount Adapter + Front Protection Cover, Sensor Connector: -, Power Supply: -, Output Specification: -

Input Specification: 0 (Voltage Input), Output Specification: 4 (PNP Open Collector 2 Outputs Switching Type + Analog Current/Auto-shift Function Switching Type), Unit Specification: w/Unit Selection Function, Lead Wire: w/o Lead Wire, Bracket/Panel Mount: B (Panel Mount Adapter)

ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Non-locking Push Type, Vacuum Pressure Sensor: None, Output: B

Input, Output Specification: 1 (PNP 5 Outputs + External Input), Unit Specification: Unit Selection Function, Panel Mount: B (Panel Mount Adapter + Front Protective Cover)

Input Specification: 0 (Voltage Input), Output Specification: 0 (NPN Open Collector 2 Outputs Switching Type + Analog Voltage/Auto-shift Function Switching Type), Unit Specification: w/Unit Selection Function, Lead Wire: w/o Lead Wire, Bracket/Panel Mount: B (Panel Mount Adapter)

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: NPN Output, Power Supply Cable, AC Adapter: Power Supply Cable, 3m, Bracket: B (Bracket)

Output: NPN Output, Power Supply Cable, AC Adapter: Power Supply Cable, 3m, Bracket: B (w/Bracket)

Digital Flow Switch ( compatible)

data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.125 0 L/min 16 L 0.25 0 40 L 0.5 0 PF2MC7 4 L 0.004415 0 cfm 16 L 0.0088275 0 40 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF2MC7 series, unit L/min, flow range 1000 L and PD = 2500

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

HRX-OM-Z015

setting status signal B EnabledOpen A Output the input signal as it is SW1 Pass through signal of the contact input signal 1 B Reverse output of the input signal A Output the input signal as it is SW2 Pass through signal of the contact input signal 2 B Reverse output of the input signal A Selected alarm occurrence : Close A.SEL Selected alarm status signal B Selected alarm occurrence : Open

High Vacuum L Type Valve

5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.