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PAB-OM-H007-D PRODUCT NAME Process Pump MODEL / Series / Product Number PAF3410 Contents Safety Instructions P.2 to 3 1. Precautions for handling P.4 2. Precautions for installation -P.5 3. Description and function of individual port -P.5 4. How to use -P.5 to 6 5. Maintenance and check -P.6 6. Specification and how to order P.7 to 8 7. Discharge capability -P.9 to 10 8.

Model Symbol Port size A B ZFA100 1/8 18 ZFA200 1/4 20 28 -8- 2) Manifold Model Symbol Port size A B ZFA100 1/8 19 18 ZFA200 1/4 24 28 Model Symbol Single unit Note) Number of manifold stations 2 3 4 5 6 7 8 9 10 L1 38 56 74 92 110 128 146 164 182 200 ZFA100 L2 50 68 86 104 122 140 158 176 194 212 L1 48 76 104 132 160 188 216 244 272 300 ZFA200 L2 60 88 116 144 172 200 228 256 284 312 Note

BUS IN BUS OUT DRAIN 1 1 1 5 4 3 2 5 4 3 2 V+ 2 2 2 0 0 0 Bit No. 6 4 6 4 3 VSolenoid on side A Output No. 0 2 4 6 8 16 28 30 CAN_H 4 Side D 5 CAN_L (SI unit side) To obtain more detailed information about operating this product, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. 4 5 Solenoid on side B 1 3 5 7 9 17 29 31 Output No.

IR10-OM08 PRODUCT NAME Regulator MODEL / Series / Product Number IR1200-A IR1210-A IR1220-A Contents Safety Instructions 1 to 5 2. Specifications 6 1. Application 6 3. Construction and Operation Principles 7 4. How to order 8 5. Bracket, gauge and switch assembly (optional) 9 6. Panel mounting 10 7. Troubleshooting 11 8.

T IDK Cover Cover installation latch 249 DMK Series Dimensions DMK6 36 0.1 36 0.1 44 37 (Socket side: With a cover) Panel mounting hole Panel mounting hole 4 x 4.3 M4 round head screw 40.5 59.5 SMC 6 1 19 26 36 2 5 3 4 11 36 45 38 DMK12 43 0.1 43 0.1 47 53 Panel mounting hole (Socket side: With a cover) Panel mounting hole 4 x 4.3 M4 round head screw 50.5 69.5 SMC 6 1 8 2 3 9 10 46 25

M 1 2 x 1 Cable connection threads suP (1) 2-Ro(PT) 114,318, 1/2 Port size Mounting hole L-bracket tNt-398-0-6 (optional) 2-Rc(PT) 1/4,3/8, 1/2 SUP port, OUT port Eleclno-Pltoulnalic Relulatnn rTUz000/3 lt'iler ilile $ruciliciliotts 2 through I station manifold.

Variations LVQ20 Model LVQ30 LVQ40 LVQ50 LVQ60 Orifice diameter Tubing outside dia. 4 8 10 16 22 Fitting type Millimeter Symbol V S Fittings LQ1 LQ2 Body class 2, 3, 4, 5, 6 2, 3, 4, 5 6 10 12 19 25 Valve type Inch Type Symbol 1/4 3/8 1/2 3/4 1 Basic type N.C. N.C. PB PA PA Applicable tubing size Body class Connecting tubing O.D. N.O. PB B A B A B A Symbol 2 3 4 6 5 N.C. N.O.

No.LC-OM08901 A (1/3) Part description Qty. LC3F212-5[][]A) Contact BVH-21T-P1.1 12 Directional control equipment 1 Operation manual (This document) 1 Cross recessed bind screw M3 4 1 Spring seat Nominal3 1 ground terminal Tooth lock washer (A) Nominal 3 1 Housing VHR-2N 1 Housing VHR-3N 1 Housing VHR-4N 1 Ensure parts below are included in the package.

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. -3- 2/10 INDEX 1. Handling 3 2. Installation to equipment 3 3. Piping 5 4. Precautions on handling 5 5. Air source 6 6. Operation check and speed adjustment 6 7. Maintenance 7 8. Feature to prevent particle generation 8 9-1. Model Selection 1 9 9-2.

Note this point for use. 6 Document No.DOC1018377 1. Application This product aims at eliminating solid foreign matter in the air line. 2.

M AX.SUP.PRESS. 1.0 M Pa OUTPUT PRESS. 0.0050.2 M Pa M ADE I N J APAN G So No. o S o1 T P2 U Q3 V R4 W Z12 -6- 5 (1) 1/4 1214 (2) (3) (4) -7-7- (1) (2) (3) (4) 1 2 3 (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 -8- (1) (2) (3) 21Nm (4) (ONOFF (5) 79Nm (6) (7) (1) (AF ) AMAFM (2) 1( 2 1.5 (1) -9- 6. (1) 1 1.5 (2) , (3) a. b. c.

4042 Rc1 1/2 4850 Rc2 4850 ( ( ( ( 5, 6, 7 5, 6, 7 5, 6, 7 5, 6, 7 ) ) ) ) G1/2 M3 0.50.6 Nm 1) 2) 3) 30 1 1) 2)1 1 0.1MPa M3 0.5 0.6 Nm 0.50.6N A-A () 5 VN*-OMJ0001-B VNB VNB VNB VNB Series Series Series Series 1 DC AC VT307 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 2 4 4 VNB0 VNB02 VNB03 VNB1 12 () (P1) (P2) () 10 ()12(P1) 10(P2) 2 VNB01V VNB02V

Be certain that the fluid used does not touch the external surface of the product. 6. Low temperature operation 1) The valve can be used in an ambient temperature of -5oC.

No.VFR5000-OMN0001 VFR5000 / -2,3 -4,5 -4,5 -5 -5 -6 -6 -6 -6 -7 -8,9,10,11 -12 -13 -1VFR5000-OMN0001 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

1 i !8 y e !0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

AC PB0111-3 (PB0111) DC Manual override (With lock) PB0111-1 Manual override (Non-locking) PB0101 PB0101-1 Note) There is polarity of (1) +, (2) . ( ): With indicator light 4-16-2 3 Series VS3115/3110 Dimensions Body ported VS3115-G VS3115-D 2-6 mounting hole 2-6 mounting hole V100 SY SYJ G 1/2 (Cable 8 to 10) Manual override Manual override VK VZ Courtesy of Steven Engineering, Inc.-230

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

MB1 Made to Order Specifications (For details, refer to page 6-17-1.)

35.8 A Load Load 40 UNIT 12 to 24VDC + RESET SET PFW30(-M) Panel fitting dimensions 8-M3 3 x 7.2 (= 21.6) 36 +0.5 0 6.4 Sensor 1 2 3 4 Blue Brown Black N.C. 1 2 3 4 +0.5 0 19.4 36 5 6 7 8 5 6 7 8 OUT1 OUT2 Load Load 12 to 24VDC + The applicable panel thickness is 1 to 3.2mm.

2 3 None 0.2MPa 0.3MPa 1.0MPa Accessory for IP8000 F Note 4) GNote 5) For IP8000, 8100 Accessory for IP8100 Accessory for IP8100 H J Note 6) Construction With opening current transmission (4 to 20mA DC) 1 Note 1) 0 Note 1) For construction No.1(with terminal box), the ambient and fluid temperatures are as follows: Exd2BT5 20 to 60C Non-explosion proof (non hazardous Iocations only) 20 to