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Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

https://www.smcpneumatics.com/pdfs/pse200_controllers_and_pse500_pressure_sensors.pdf

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R

https://www.smcpneumatics.com/pdfs/zse50_zse60_ise50_and_ise60_series_digital_pressure_switches.pdf

SMC VV5Q21-12C4M3-W mfld, VV5Q* MANIFOLD VQ 4/5 PORT

1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55

https://www.smcpneumatics.com/VV5Q21-12C4M3-W.html

SMC VV5Q21-02C6M3-W mfld, plug-in, VV5Q* MANIFOLD VQ 4/5 PORT

1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55

https://www.smcpneumatics.com/VV5Q21-02C6M3-W.html

SMC SS5X3-45-03BRS-N3 mfld assy, 3-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .88184 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45-03BRS-N3.html

SMC SS5X3-45-03D-N7 mfld assy, 3-sta, SS5Y3 MANIFOLD SY3000***

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .68587 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45-03D-N7.html

SMC SS5X3-45-03U-N7 mfld assy, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .58790 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45-03U-N7.html

SMC SS5X3-45-04D-C6 mfld assy, 4-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .67924 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45-04D-C6.html

SMC SS5X3-45FD-06U-N7 mfld, assy, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .95993 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45FD-06U-N7.html

SMC SS5X3-45FD-07US-N7 mfld assy, 3-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.05821 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45FD-07US-N7.html

SMC SS5X3-45FD-08U-N7 mfld assy, 8-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.14872 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45FD-08U-N7.html

SMC SS5X3-45FU-08U-N7 mfld assy, 8-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.32277 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45FU-08U-N7.html

SMC SS5X3-45NFD-03D-C6 mfld base 3-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .97488 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFD-03D-C6.html

SMC SS5X3-45NFD-04U-N3 mfld base, 4-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .68343 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFD-04U-N3.html

SMC SS5X3-45NFD-06D-C6 mfld base, 6-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.10231 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFD-06D-C6.html

SMC SS5X3-45NFD-07D-C6 mfld, 7-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .97488 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFD-07D-C6.html

SMC SS5X3-45NFD-08U-N3 manifold assy, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.54323 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFD-08U-N3.html

SMC SS5X3-45NFD-19B-N3 19 sta, mfld, base, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.54323 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFD-19B-N3.html

SMC SS5X3-45NFU-04B-N7 mfld base, 4-sta, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .96200 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45NFU-04B-N7.html

SMC SS5X3-45SV-08U-C6 mfld assy, SS5Y3 MANIFOLD SY3000

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.43300 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

https://www.smcpneumatics.com/SS5X3-45SV-08U-C6.html