SMC Pneumatic Clean Series

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

EX600-WEN_WSV.eng

Hardware failure) 3 3 4 5 4 1 3 IRELAND (353) 1 403 9000 W-SS OFF Power supply for control and input (US1) is not supplied.

EXxx-OMV0028.eng

(4) EX600-ED5-# PWR IN: M12 4-pin Plug, A-code GREECE (30) 210 271 7265 PWR OUT: M12 5-pin Socket, A-code Red LED flashes.

SI Unit

Table 4-5 Details of 1 Byte feedback information about the valve output status module Bit Description Explanation 0 Status of safe output 0: OFF, 1: ON 1 Status of the status bit in bit0 0: invalid, 1: valid 2..7 Reserved Fixed to 0 26 No.EX##-OMY0011-A 5.

Pressure Sensor Controller

(The range to be changed: 5%R.D.) 3. If no operation is made for longer than three seconds or press the button, the product will display the current pressure measurement value which will then displays in turn with [FSt]. 4. Press the button to display an adjusted amount (percentage), which will then displays in turn with [FSC]. 5.

PFxx-OMS0001CN

4 mA [F98] -56No.PF-OMS0001CN-A [F99] <> [F99] [iNi] [ini] [] [oFF] [oN] 5 [F99] -57No.PF-OMS0001CN-A 1 // () 1 -58No.PF-OMS0001CN-A [LoC][][LoC] 1 [LoC]1 < -> 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] -59No.PF-OMS0001CN-A < -> [F81] 5 [UNLoC] [LoC] 5 [LoC] [UnLoC] ( ) [000] 1 [UNLoC] [FAL] 3 [LoC] /30 -60No.PF-OMS0001CN-A [000] <> [UNLoC] 5 ( ) 1 1 -61No.PF-OMS0001CN-A

Cylinder with lock

Grease on the groove Grease on the outer circumference A little less than 1 mm Range of grease L= Stroke 1 or more than 100 mm 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 13 Position for application of grease Grease application amount Unit: g Stroke 32 40 50 63 80 100 Positions for Bore size application of grease At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 1 0 50st added 1 1 1 1.5 2 3 27 - 4-4

VFR5000 Series

No.VFR5000OMA0001B 5 Port Solenoid Valve PRODUCT NAME VFR5000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4, 5 Selection -4, 5 Mounting -5 Piping -5, 6 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -6, 7 Maintenance -7 Specific Product Precautions -8 to 11 Trouble shooting -12 Remedy -13 -1VFR5000OMA0001B Safety Instructions These safety instructions

ELECTRO-PNEUMATIC POSITIONER

IP80-OM03-F PRODUCT NAME ELECTRO-PNEUMATIC POSITIONER MODEL / Series / Product Number IP8000 IP8100 Contents Safety Instructions 3-4 Introduction 5 1.Specifications 6 2.Operation principle 7-10 2-1 Type IP8000 7-8 2-2 Type IP8100 9-10 3.Attaching 11-13 3-1 Type IP8000 11-12 3-2 Type IP8100 12-13 4.Piping and Attaching of Internal Feedback Unit 14-16 5.Electrical Wiring 16 5-1 Positioner with

LEJ-OM002xx

2) Driver (3) Motor cable (5) Lock cable DC24V (4) Encoder cable Host controller, etc (1) Electric actuator (6) I/O connector 5 - 1.2 Startup When switching the power on for the first time, follow the startup procedure below.

Air cylinder

Fig. 2 Sealant tape 2-5.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

CS1

CS1C125SCS1125, #5 CS1C140SCS1140, #5 CS1C160SCS1160, #5 CS1C180SCS1180, #5 CS1C200SCS1200, #5 CS1C250SCS1250, #5 CS1C300SCS1300, #5 The drawing shows with an auto switch.

ASD

5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

KK/KK13

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable

MK

5 !6 !7 !8 !

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Title not found

(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.

-fl Seies

007'e) 5 14.2) > lnigrtace rggulator/Egulatior to B I{ABBF4O50.NO.E.i lPlug.in typl NAnBF4O50.N0.B.2 (l{on plug.in typel ( > :B(H block disc IntErlace speed control wFs4ooo-2oA.l (Plug-in typ) wFs4ooo-2oA-2 (Non plug-in type) o 6 5 B 5 d bet 1.65 F/-.-r r r R < i 5 'gauge nipple siz may vary slightly Series NVFR400[:Base Mounted T]pe @ o Manifold block Parts List No.