CJ2X/CUX/CQSX/CQ2X/CM2X

Data Low speed cylinder Conventional cylinder Low speed cylinder Time 10-3-2 10-3-3 3 Low Speed Cylinder Specific Product Precautions Be sure to read before handling.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

CRQ2

Applicable shaft type: W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) Y 3 to 9 3 to10 L2 6 (9 Y) to Y 7 (10 Y) to Y L4 max Y Y Size 10 15 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X 2 X 2 Size 10 15 Symbol :: A14 Symbol :: A15 Symbol

SYJ300/500/700

To order connector cable only Interface S070 Connector dimensions (Ground) 4 Brown: 1 Bule: 3 VQ Pilot valve (V111) Adapter plate 9 1 3 VKF Black: 4 33.9 Conventional type VQZ L 35 10 (Orange) Manual override VZ Part no.

Fieldbus System

R) EXH port] (Double sided type: C12) Input connector Digital Output Unit C10: 10 One-touch fitting (C12: 12 One-touch fitting) Output connector Digital Input Unit 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 11.5 R R 8 76.5 12 3 3 X 56.6 (12) 49.5 B B B B B B B B P X P12 30 25 1 1 A A A A A A A A 10

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

C95

200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n

MGP

40 20 30 Load weight m (kg) Load weight m (kg) 32 2 3 4 5 25 20 16 10 5 4 16 2 3 1 1 0.2 0.3 0.4 0.5 0.5 0.2 0.3 0.4 0.1 10 100 0.1 10 100 20 30 40 200 50 50 200 20 30 40 Eccentric distance l (mm) Eccentric distance l (mm) Over 50 stroke Over 100 stroke P=0.5MPa 100 80 63 P=0.5MPa 20 100 25 50 Load weight m (kg) 10 Load weight m (kg) 40 32 20 5 25 4 10 16 20 3 16 2 1 10 100 1 10 100 200

EXxx-OMY0004

1 0 Input 3 & 7 power source: UT2 with clock pulse 1 1 Input 3 & 7 power source: each power source without clock pulse Bit 6 Bit 5 Bit 4 Discrepancy time for Ch.3 and Ch.7 (input connector 3) Same as Table 10-11 Bit 7 Input filter time for Ch.3 and Ch.7 (input connector 3) Same as Table 10-11 58 No.EX##-OMY0004 10.7.

CQS

5.5 0.5 9.5 5.5 5.5 1.5 17 5.5 3.5 [6] 1.5 D16 21.5 9 6 1 9 5 6 2 19 5 3 [5.5] 2 Bore size (mm) 20 25 14 10 4 14 10 10 6 22.5 10 8 [10.5] 6 -X 25 27 16 11 6 16 12 11 7 24.5 12 10 [12.5] 7 20Auto switch model D-F9BAL Data Symbol A B W HS Double Acting, Single Rod; Single Acting, Single Rod, Spring Return/Spring Extend 12 4.5 3.5 14.5 16.5 Bore size (mm) 16 5 3 15 18.5 20 9 6.5 11.5 22 25

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Inertial load: Ta 20Inertial load Effective torque Ts . 10 x Ta = 10 x x Effective torque (3 to 5) Tf Effective torque 10 Ta = 10 x 0.00109 x (2 x ( / 2) / 0.32) Load types = 0.380 Nm Effective torque OK Effective torque Note) I substitutes for t the value for inertial moment.

e

Load Mass Allowable Moment E-MY2H/M1 E-MY2H/M3 E-MY2H/M2 E-MY2H/m3 60 60 50 60 60 50 50 50 40 40 30 30 30 30 q r w et 20 20 20 20 Load Mass (kg) Moment (NNm) Moment (NNm) Moment (NNm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 MY2H16 4 4 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400 500 1000 1500 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

CL

Cylinder Double Acting, Single Rod With Mounting Bracket Foot style: CLG1LN Foot Style Without rod boot With rod boot ZZ Bore size (mm) BZ M W X Y LS LT LX LH LD LZ LC ZZ 202 219.5 222.5 246 182 197.5 200.5 226 117 127 128 142 3 3 3 3 50 57 60 68 62 70 74 84 25 28 28 33 6 6 6.6 6.6 4 4 4 4 63.5 74.5 74.5 83 3 3.5 3.5 4 10 10 10 10 15 15 16 16.5 7 7 8 8.5 20 25 32 40 For long stroke, refer

Fieldbus system EtherCAT compatible SI Unit

ms 3 200 ms 0 Offset binary 1 Sign magnitude 0808 2 2's complement 0 Offset binary 1 Sign magnitude 0809 2 2's complement 3 Scaled 1 Sign magnitude 080A 2 2's complement 0 None 1 2 value average 080B 2 4 value average 3 8 value average -96No.EX-OMA1023 Enumeration data definion (continued) Index Value Text 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 080D 4 05 V 5 15 V 6 020 mA 7 420 mA 3

VQ7-6/7-8

) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1.10 3 1.60 8 38.0 7.9 0.33 1.0 3 8 (10) 4.5 1.90 10 46.0 15.0 0.61 6 0.33 3 7.9 26.0 1.10 Note) Weight of grommet type.

MXS Series Air Slide Table

Mar=15.9(Same value as May) Calculate load rate 2 of static moment. '2=0.4/15.9=0.0252 3-3 Load rate of kinetic moment Pitching Examine for Mep (30+10) Mep=1/3 x 168 x =2.24 1000 We=4/100 x 10 x 420=168 A2=10 Meap=1 x 0.7 x 15.9=11.1 K=1 =0.7 Mpmax=15.9 3=2.24/11.1=0.202 (Ln+An) Me=1/3 We 1000 Collision equivalence load We= W V : Dumper coeficient With urethane bumber (Standard) =4/100

HRX-OM-X010

to 10V] [-100 to 100deg C:-10 to 10V] +15V 100 + ANALOG CIRCUIT 10 10 Output DI PV Analog Output*3 DI PV Analog Output*3 -15V 22 22 Output ANALOG COM [0 to 20 M:0 to 10V] [0 to 20 M:0 to 10V] +15V 12 Intput Temp.SP Analog Input*3 Temp.SP Analog Input*3 12 + -15V 1M 24 Intput [-100 to 100 deg C:-10 to 10V] [-100 to 100 deg C:-10 to 10V] 24 ANALOG COM 13 Output EMO signal EMO signal 13 25

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18 Note) Adjust the auto switch