ZP

134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 +10 3.6 +10 3.6 0 0 30 30 +1 1 +1 1 +20 +4.9 +6.4 +20 +4.9 +6.4 50 50 +25 +25 +40 +49.9 +51.4 +40 + 9.9 +51.4 13-11-110 New New Vacuum Pad More shapes and sizes of pads.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Combination example q Air combination AC20B-02E-D 1 pc. Spacer with bracket Y200T-D 1 pc. Modular mounting type 2-port solenoid valve JSXM21-AN301R-5G-U-F 1 pc.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

Air Cylinder Series CM2

Auto switch model Bore size (mm) 25 20 32 40 D-A9 D-M9 D-M9W q BM2-020 (1) w BJ3-1 q BM2-025 (1) w BJ3-1 q BM2-032 (1) w BJ3-1 q BM2-040 (1) w BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7BAL D-H7NF BM2-025 BM2-020 BM2-032 BM2-040 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-025 BA2-020 BA2-032 BA2-040 D-A3A/A44A D-G39A/K39A BM3-025 BM3-020 BM3-032 BM3-040 Note 1) Two kinds of auto switch mounting brackets

7

1 t !1 t o y o y u IN(P1) u r IN(P1) r OUT(P2) B A OUT(P2) A B C IN(P1) IN(P1) e C e q w q w VXD23 VXD24 !2 i i !0 !2 A B !0 !1 !1 o t o u B u OUT (P2) w C IN(P1) A r r OUT(P2) IN (P1) e e C w IN(P1) q q VXD27, 28, 29 VXD25, 26 Component Parts Operation When coil !2 is energized, armature assembly !1 is attracted by core i and pilot valve A is open.

Stability of suction position,

1 !1 !2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Thermo-chiller

Note q Overflow port assembly 1 w Automatic fluid fill assembly 1 e Automatic fluid fill tank assembly PE 1 r M4 screw 2 For securing automatic fluid fill assembly t M6 screw 2 For securing overflow port assembly y Hose clamp 1 For securing automatic fluid fill assembly hose u Hose clamp 1 For securing overflow port assembly hose i Automatic fluid fill label 1 w q r t x 2 x 2 y u i uBall

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

NCQ8

1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

, Wetted part material: PEEK or PFA (body/plate), VALVE, CHEMICAL, BODY PORTED, VALVE, LVM CHEMICAL VALVE, 2 PORT, 2A, LVM BODY PORT, NO SIZE RATING, .09098 lb, ModelValve constructionValve typeNumber of portsFluid Note 1)Operating pressure rangeOrifice diameterResponse timeLeakageProof pressure Note 2)Ambient temperatureFluid temperatureVolume of valve chamberMounting orientationEnclosureWeightRated

VS7-6

Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:

Electric Actuator

1 6N S q w e r t y u i o !

Series AP500

q w q AP1510S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 2PW 3PW 4PW 40 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Refer to gauge guide (P.94) for gauge specifications.