LEC-OM005xx

Press the MENU key or press the ESC key twice to return to the menu screen. 42 - (2) Operation check by test drive in normal mode When connecting to LECPA, the function Test drive cannot be used. TB Ver2.1 or more: When connecting to LECPA, the item Test drive is not displayed in Test menu. Select the test function Press the MENU key to shift to the menu screen.

SFOD-OMT0005CN

Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)

Step Motor Driver （ Pulse input type ）

Please refer to 6.2 (3) Pulse signal input circuit for details of pulse input circuit. 42 - Define the ratio of electronic gear of pulse signal input. Undefined parameter 11 : "Electronic gear (numerator)"(Default: 1) Undefined parameter 12 : "Electronic gear (denominator)"(Default: 1) Undefined parameter No.11 This product controls LE series motor (800 pulse per rotation).

LEC-OM038xx

26 Same as ID1 ID4 RWrn+27 to 35 Same as ID1 ID5 RWrn+36 to 44 Same as ID1 ID6 RWrn+45 to 53 Same as ID1 ID7 RWrn+54 to 62 Same as ID1 ID8 RWrn+63 to 71 Same as ID1 ID9 RWrn+72 to 80 Same as ID1 ID10 RWrn+81 to 89 Same as ID1 ID11 RWrn+90 to 98 Same as ID1 Same as ID1 ID12 RWrn+99 to 107 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 42

JXCx-OMT0034CN

bit1) Rx1A (bit2) Rx1B (bit3) Rx1C Rx2F (1) Rx01 Rx00 0 0 0 1 1 0 41 - (2)READY 1(ON) (3)ALARM 1 1(ON)0(OFF) (4) 0(OFF)1(ON) (5) 1 1(ON)0(OFF) CN2SW OFF [Ry07]ON (6)() ID ON(1)ID OFF(0) Rx0F Rx0E Rx0D Rx0C Rx0B Rx0A Rx09 Rx08 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 Rx13 Rx12 Rx11 Rx10 ID12 ID11 ID10 ID9 (7) (LEC)ID ID 2 ID Rx1B Rx1A Rx19 Rx18 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 42

LEC-OM036xx

bit 0,1 6 bit 0 7 bit 0 ID9 All mode 0 HOLD bit 0,1 1 SVON bit 0,1 2 DRIVE bit 0,1 3 RESET bit 0,1 161 4 SETUP bit 0,1 5 bit 0 6 bit 0 7 bit 0 ID10 162 to 163 Same as ID9 ID11 164 to 165 Same as ID9 ID12 166 to 167 Same as ID9 Corresponding Q_Address Data name mode 168 169 Unused (Do not use it.) 177 178 181 Gateway unit status flag All modes Address 182 to 199 : Unused (Do not use it.) 42

LEC-OM034xx

65500 mm/s2 Data writting 28 Pushing force 1 0 to 30 10% 29 Threshold 1 0 to 30 10% 30 Pushing speed 1 0 to 255 mm/s 31 Positioning thrust 1 0 to 30 10% 32 H 33 L In pos 2 0 to 65500 0.01mm ID2 34 to 53 Same as ID1 ID3 54 to 73 Same as ID1 ID4 74 to 93 Same as ID1 ID5 94 to 113 Same as ID1 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 42

JXCx-OMT0028CN

IN1 bit 0,1 2 IN2 bit 0,1 3 IN3 bit 0,1 0 4 IN4 bit 0,1 5 IN5 bit 0,1 6 bit 0 7 bit 0 0 HOLD bit 0,1 1 SVON bit 0,1 2 DRIVE bit 0,1 3 RESET bit 0,1 1 4 SETUP bit 0,1 5 JOG(-) bit 0 6 JOG(+) bit 0 7 FLGTH bit 0 ID1 0,1 2 1 No. 063 1ABS() 2 INC( 3 1 )0: ( ) 4 H 2 065500 mm/s 5 L 6 H 7 4 2147483647 0.01mm 8 9 L 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L H=L= (LECP6)(LECA6) 42

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

Tightening torque for piping Connection thread Aprropriate tightening torque(Nm) Rc 1/4 8 to 12 Rc 3/8 15 to 20 Rc 1/2 20 to 25 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/2 40 to 42 Rc 2 48 to 50 Rc 21/2 Rc 3 5. Piping to products When connecting piping to the product, avoid mistakes regarding the supply port, etc. 5 Wiring Caution 1.

SMC Wireless System EtherNet/IP ® compatible

(Refer to page 42 the section "Setting and Adjustment" for details.) -14No.EX-OMU0028-D Definition and terminology Term Definition 100 100BASE-TX Standard LAN transmission line with communication speed of 100 Mbps. B Base A unit which establishes wireless communication of input or output data to the remote. It is connected to a PLC to establish communication of input or output data.

Fieldbus Device Handheld Terminal

(page 42 to 46)) 5. Select the setting value with the , , and buttons and press button. 6. Press the button to complete the setting. To copy the set value to channels of the same type in the unit, press the button. 7. Press the button. Copy is completed, and the screen returns to the channel parameter selection screen. -41No.EX-OML0011-C No.

VND Series

Warning Caution Connection thread Proper tightening torque ( ( ( (N m) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Rc1 1/2 48 to 50 Rc2 48 to 50 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 6.

CEx-OMP0016

1 Hard anodized 37 Parallel pin Stainless steel 4 3 Head cover WL Aluminum alloy 1 Hard anodized 38 Tension plate Carbon steel 4 Nickel plated 4 Piston yoke Aluminum alloy 1 Anodized 39 Side cover L Aluminum alloy 1 Hard anodized 5 Piston Aluminum alloy 2 Hard anodized 40 Side cover R Aluminum alloy 1 Hard anodized 6 End cover Special resin 2 41 O-ring NBR 2 7 Wear ring Special resin 2 42

EXxx-OMU0020EN

LED indicators 42 7.6. Block diagram 43 8. Digital Output Module EX245-DY1 44 8.1. Parts and description 44 8.2. Specifications 45 8.3. Wiring 46 8.4. Process data 46 8.5. LED indicators 47 8.6. Block diagram 48 -2No.EX##-OMU0020-A 9. End Plate EX245-EA2-1/2 49 9.1. Parts and description 49 9.2. Specifications 50 10. Accessories 51 10.1. Markers 51 10.2. Y Connector 52 10.3.

Electric Actuator / Guide rod Slider

Deceleration(mm/s2) 3,000 Positioning repeatability (mm) 0.08 Lost motion [mm]Note 3 0.1 or less Lead equivalent (mm) 48 Impact resistance/ vibration resistance (m/s2) Note 3) 50 / 20 Drive method Belt Guide type Slide bearing Ball bushing bearing Allowable external force(N) Note 4) 5 Operating temperature range () 5 to 40 Operating humidity range (%RH) 90 or less (No condensation) Motor size 42

HRX-OM-K003

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

Fieldbus system PROFINET compatible SI Unit

LED indicator during energy saving mode for PROFIenergy Table. 6-8 LED indicator during energy saving mode for PROFIenergy LED Indicator LINK/ACT OFF FO OFF SF OFF BF OFF US1 0.5 sec ON 3 sec OFF US2 OFF NOTE For module parameter of PROFIenergy, refer to Section 4.2.2. 42 No.EX-OMW0011-B 6.5. Block diagram The following figure shows the block diagram of each SI Unit.

Solenoid Valve

No.SQ1000V-OMQ0002-B 26 No.SQ1000V-OMQ0002-B 27 No.SQ1000V-OMQ0002-B 28 No.SQ1000V-OMQ0002-B 29 No.SQ1000V-OMQ0002-B 30 No.SQ1000V-OMQ0002-B 31 No.SQ1000V-OMQ0002-B 32 No.SQ1000V-OMQ0002-B 33 No.SQ1000V-OMQ0002-B 34 No.SQ1000V-OMQ0002-B 35 No.SQ1000V-OMQ0002-B 36 No.SQ1000V-OMQ0002-B 37 No.SQ1000V-OMQ0002-B 38 No.SQ1000V-OMQ0002-B 39 No.SQ1000V-OMQ0002-B 40 No.SQ1000V-OMQ0002-B 41 No.SQ1000V-OMQ0002-B 42

VNA Series

Warning Caution Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/4 40 to 42 Operating Precautions 1. Valves will reach high temperatures from high temperature fluids. Use caution, as there is a danger of being burned if a valve is touched directly. 2.

High Vacuum L Type Valve

Model Starting Holding Power(W) Current(A) Power(W) Current(A) *G/C/D/T , P5G 36 1.5 4.8 0.38 P1G 50Hz 30.5 0.47 14.8 0.35 XLS-1660Hz 10 0.27 P2G 50Hz 30 0.24 4.9 0.11 60Hz 2.3 0.10 *G/C/D/T , P5G 47 2.0 5.3 0.5 P1G 50Hz 42 0.62 20 0.46 XLS-2560Hz 13.5 0.36 P2G 50Hz 45 0.35 6.7 0.15 60Hz 3.0 0.12 7 XL*-OMI0013-B 4.