2-Color Display High Precision

The set-value can be copied to up to 10 switches simultaneously.

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

smcmaintenancepartslist

Note) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (10: 5 g and 10 g, 15: 10 g). Order with the following part number when only the grease pack is needed.

Table of Contents

-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

SYA3000/5000/7000

C6 C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000

5 Port Air Operated Valve SYA3000/5000/7000 Series

C6 C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000

Compact Manifold Regulator Series ARM5

19 20 6 6 8, 5/16 8, 5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

modular-press-e

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Modular F.R.L. Pressure Control Equipment

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Mechanically Jointed Rodless Cylinder Series MY1

MY1B10G Stroke 10 10 7.3 7.8 2 x M5 x 0.8 (Hexagon socket head plug) 2 x 2 x 3.4 through-hole Bottom side M4 x 0.7 depth 7 4 x M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2 x M3 x 0.5 thread depth 5) 2 x 5 counterbore depth 2 25 24 3.5 1 2 x M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

PSxx-OMM0006CN

DC1224 V10 DC1224 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -57No.PS-OMM0006CN-E No. 14 15 , 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -58No.PS-OMM0006CN-E , 80 mA 7F.S.(3.5F.S.) 1 1F.S. 1 -59No.PS-OMM0006CN-E (M8(3 )62 ) ZSE40A() ZSE40AF() ISE40A() 0-101.3 kPa -100.0100.0kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0kPa

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 2 (Lateral), Valve Stations: 06 (6 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: N7 (One-touch Fitting for Ø1/4), Mounting: D (DIN Rail Mounting w/DIN Rail)

Series: 10-SV1000, Base Type: 10FD, Connector Entry Direction: Lateral, Valve Stations: 6 Stations, P, E Port Location: U Side, 2-10 Stations, Pilot Type: Internal Pilot, A, B Port Size: One-touch Fitting for Ø1/4, Mounting: DIN Rail Mounting w/DIN Rail

4 Port Solenoid Valve Series VQD1000

"#$ %&' % & ' ( ) * + % & ' ( ) * + Series VQD1000 Dimensions/Base Mounted Plug lead manifold unit (VV4QD15-) Lead wire length 300 mm (P,R port) For latching Indicator light B C A B C A B C A B C A B C A 2 x 4.5 (Mounting hole) (59.7/latching type) 57.5 52.5 3(R) 51 3(R) 16 9 32 1(P) 17 1(P) 10 10 P = 11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side

EtherNet/IP TM Compatible Fieldbus System

Power supply for solenoid valves: 24 VDC +10%/-5% 68 No.EX-OMS0014-A Fault No. 10 Fault Possible cause Investigation method Countermeasures Tighten the branch cable connection. (if there is a broken wire, replace the cable) Power supply for input and control: 24 VDC 10% SI unit PWR LED is OFF. Check the branch cable connections and check for broken wires.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time.