80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

stroke adjuster at extension end) 20 F 35 62 58 48 26 18 1 6 4 x M5 x 0.8 thread depth 7 N x M5 x 0.8 thread depth 6 (Insert) 12 6 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA x M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

SMC

at extension end KA 21 NA-M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 6 5.5 12 Operating port 2-M5 x 0.8 11 3 5H9 depth 4 +0.030 0 2-M5 x 0.8 thread depth 5.5 GA HA B A 5H9 depth 4 +0.030 0 NN-M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN1) x H Section AA

SMC Electronic Switch Series Variations

M5 X 0.8 0XY: M6 X 1 58 ISA ZSE1 ISE1 6.5 10.2 ZSE2 ISE2 8 10 17.6 10 5.5 ZSP 2-3.3 Mounting hole ISl ZSM PFl Connector style/ZSE2-0Xl-15C IFl Pressure setting Indicator light trimmer L H Vacuum Vacuum pad connection port 20 supply port 7 35.6 Circuit Lead wire length 600 (3000) 50 9.5 Vacuum pad connection port 0X: M5 X 0.8 0XY: M6 X 1 58 Vacuum supply port 0X: M5 X 0.8 0XY: M6 X 1 6.5

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

smcmaintenancepartslist

Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) Model Hexagon socket head cap screw Fe Ni Tightening torque (Nm) MXS6 MXQ6 0.5 0.5 M2.5 x 6 M2.5 x 6 MXS8 MXQ8 0.9 0.9 M3 x 6 M3 x 6 MXS12 MXQ12 2.1 2.1 M4 x 10 M4 x 8 MXS16 MXQ16 M5 x 12 M5 x 10 4.3 4.3 MXS20 MXQ20 M5 x 14 M5 x 16 MXS25 MXQ25 M6 x 18 6.9 M6 x 16 6.9 A level difference is set to t No level difference with a

CL

12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

CL

12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

Rotary Actuator

(Example) For M5: L1 = 10 Applicable shaft types: S, W, Y Equal dimensions are indicated by the same marker. Shorten the long shaft.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Area: (800) 258-9200-www.stevenengineering.com 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators M5 x 0.8 Relief port (10-, 21-) Vacuum port (11-, 22-) GC GB X 2 x LD 2 x P (Rc, NPT, G) GA H1 Y Width across flats B1 I NDh8 D B LH N MM Width across flats KA L LX H K A AL 3 ZZ + Stroke S + Stroke N Thread depth A1 Female thread MM (mm) Female Rod End A1 10 10 10 10 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MM 86 86 88 114 ZZ Bore size 8 8 12

42

Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

MGP

12 13 15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

MHF2

6 62 86 2-M6 x 1 thread depth 6 33 56 Finger closing port M5 x 0.8 Mounting thread E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31 31 Finger opening port M5 x 0.8 2-10 1.2 1.2 E-E +0.1 0 Close: 0 Open: 201 4-M6 x 1 thread depth 6 40 8-M4 x 0.7 thread depth 4 Mounting thread Attachment mounting thread 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 16 16

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.