Ionizer

(High pressure warning label position at 300 mm length) 19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

dia 1.6 Cross section 0.34mm2 VP VG 59 PE port R 3 1 P (30) VP 25.5 11 M5 X 0.8 External pilot port (Only external pilot style (R)) 2-Rc(PT)1/4 P(SUP)port 20 12.5 38.5 2-Rc(PT)1/4 R(EXH)port VQ The broken line indicates DIN rail mounted style [-D]. 43.5 11 VQZ L plug connector (L) DIN terminal (Y) VZ 300 (Lead wire) 86(87) VS 83(84) 90 MAX.10 61(64.5) 87 Pg.7 Cover dia 1.5 Cross section

VDW Series

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

100

Supply valve Circuit diagram (300) 67 [69.2]1 Manual override Specific Product Precautions 35 (175) 28.6 [35.6]1 7.7 214 [221]1 185.8 *1 [ ] for AC * Tighten to the recommended torque on pages 10 and 11 to mount the body.

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

MY1

500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

MXS

0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection Example Operation conditions 1 Model used Cushion style Work mounting position

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) + + + + R port P, E port R: External pilot style H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector -+ + SYJ52R is only for manifold use.

Size: 40, Motor Type: S6 [AC Servo Motor (Absolute Encoder) 100W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 300mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: -, I/O Connector: -

Series: LEFB (Belt Drive), Size: 40, Motor Mounting Position: Top Mounting Type, AC Servo Motor: S4 (400W Output, Incremental Encoder), Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: R (Robotic Flexible Cable), Cable Length: 2 (2m)

Series: LEFB (Belt Drive), Size: 40, Motor Mounting Position: U (Bottom Mounting Type), AC Servo Motor: S4 (400W Output, Incremental Encoder), Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: R (Robotic Flexible Cable), Cable Length: 2 (2m)

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: B (LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: R (Robotic Cable, Flexible Cable),

Series: Belt Drive, Size: 40, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 400W Output, Incremental Encoder, Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Robotic Flexible Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Series: Belt Drive, Size: 40, Motor Mounting Position: Bottom Mounting Type, AC Servo Motor: 400W Output, Incremental Encoder, Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Robotic Flexible Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 2m, Driver