CL

to 400 301 to 450 301 to 800 GB GB TB GB ZZ ZZ 210 227.5 230.5 255 ZZ ZZ 206 223 226 250 ZZ ZZ 206 223 226 250 20 25 32 40 186 201 204 230 149 159 162 178 12 12 12 13 20 25 32 40 190 205.5 208.5 235 149 159 162 178 12 12 12 13 125 135 136 151 186 201 204 230 149 159 162 178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 58 298 58 52 17.5 66 1/4 stroke 306 314 80 13 M12 x 1.75 10 22 117 17 M22 x 1.5 37 1/2 55 15 23 70 208 71 350 80 65 21.5 80 1/4 stroke 359 368 100 16 M12 x 1.75

LEKF-OMZ0035

Slider type LEKFS series . 7 2.1 Specification . 7 2.2 How to Order . 9 2.3 Construction . 11 3.

VSA4

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

VQC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQC2000 800 700 600 500 400 300 200 100 0 VQC4000 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open.

Modular F.R.L. Units

Note 11) : For thread type: NPT only.

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

XLA Series

55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

XLA- ∗ -F7NJ ∗ - ∗ Series

55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Motor shaft should be round shape. *10 Please avoid loosen the screws for mounting of motor. *11 Do not allow collisions at either end of the table traveling distance. Additionally, when running the positioning operation, do not set within 7 mm of both ends.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Maximum speed (mm/s) Up to 800 Up to 600 Up to 500 Up to 300 Stroke (mm) Up to 10 Up to 20 Up to 30 Up to 10 Up to 20 Up to 30 Up to 50 Up to 100 Up to 150 Up to 200 Up to 50 Up to 100 Up to 150 Up to 200 (13) (12) (11) (10) (9) (8) 8 Selection graph (15) (14) (16) (17) (18) (21) (19) (20) 12 to 40 L: Overhang The distance between the cylinders central axis and the load center of gravity

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

Compact Type

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 VQ7-8

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

V100

Moreover, the residual voltage of the diode is approximately 1 V. 4-2-11

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

VNB

7 12 11 18 11 18 19 28 19 28 29 43 29 43 130 220 210 320 210 320 330 500 330 500 520 770 520 770 1.4 1.5 VX 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 1 2.5 2.6 VX3 5.7 5.8 32 JIS Symbol VXA Valve type Type N.C.

Cylinder with Lock Series CLS

800 900 160 200 140 Load mass: m (kg) Load mass: m (kg) 180 1000 RLQ 700 800 900 600 125 160 500 MLU 600 140 400 500 125 400 MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg)