Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

VFRA3000

1 5 Port Air Operated Valve Series VFRA3000 How to Order SA 02 VFRA3 11 2 VA SA Thread type (Including pilot port) Function VA Nil Rc 2 position single 1 2 3 4 3 position exhaust center F N T 2 position double G NPT NPTF 3 position closed center VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

VXZ

Frequency (Hz) 50 60(53) 18 60 51(44) 12 Model Power source VX3 7.5 6 8 11 9.5 11.5 AC VXZ22 VXA DC 50 80 21 60 67 17 AC VXZ23 VN DC LVC JIS Symbol LVA OUT LVH IN LVD N.O.

Ejector Valve Unit Series ZYY/ZYX 1

3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !

Brake mechanism added

25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Dimension in parentheses shows Q5 (M5 x 0.8). 13-4-11 11 Series ZM For Single Unit/With Valve Basic Type with Switch and Valve ZM1 -K-E H M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-4.5 Release flow adjusting needle Release valve Supply valve

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

ALB900

To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

LEH_C

LEHS 4.1 LEHS10 LEHS20 LEHS32 LEHS40 / (mm) 4 6 8 12 (mm) 255/76 235/56 235/40 235/40 2.25.5 922 3690 52130 (N) 40100 1) 3) 1.43.5 717 /(mm/s) 2) 3) 570 /550 580 /550 5100 /550 5120 /550 (mm) 4) 0.02 (mm) 5) 0.05 /(mm) 6) 0.5 / (m/sec 2) 7) 150 30 (c.p.m) 60 () 540 (%RH) 90 () 185 410 975 1265 (g) 150 345 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 /

High Vacuum L Type Valve

XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

VXA21/22

) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-

AFF

Max. flow line Pressure drop (MPa) Pressure drop (MPa) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) 14-20-11 4 Series AFF Construction AFF2B to AFF37B AFF75B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Note) Refer to page 14-20-59

ZSE30/ISE30

8 17.8 7.2 9.5 34.5 47.8 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R4.5 MPa PRESSURE R4.5 ZSP 21 OUT ISA2 SET MADE IN JAPAN IS 8.75 Panel thickness 0.5 to 6 ZSM PF2 IF Panel mount adapter + Front protective cover Data 17.8 8 9.5 11 42.4 34.5

100

1 Output Nil None B Adapter assembly for bottom mounting*11 (Included) Nil None A NPN open collector B PNP open collector GN With vacuum pressure detection (G) port (Rc1/8, G1/8, NPT1/8)*6 *11 This adapter assembly is for adjusting the product to the 27 mm pitch of the bottom mounting thread of the existing ZL212 series model.

MHL2

Model MHL2-25D MHL2-25D1 MHL2-25D2 70 124 142 88 142 160 48 102 120 100 182 200 150 282 320 196 328 366 38 86 104 12-4-11 12 Series MHL2 Dimensions MHL2-32D Closed J 2-M8 x 1.25 thread depth 11 (Mounting thread) A cross view (Fingers closed) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

Tie-rod Type Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 Specifications with included auto switch are the same for Double Acting/Single Rod.

CLA

MM I """.0 40 -500 20-500 27 30 60 96 Yo V . 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 30 71 M14X1.5 M18X1.5 M1SX1 .5 M22X l .5 I 50 600 20-600 32 35 70 108 Yo V, 52 20 40 10 95 ' 7 27 59 13 12 M8X1.25 7 30 80 , 63 -600 20-800 32 35 86 11 5 Yo y. 64 20 40 10 102 17 26 67 18 15 Ml0Xl .25 7 40 99 ,. 80 -750 20 750 37 40 102 129 Yo Yo 78 25 52 14 11 3 21 30 72 23 17 M12X1.75 11 48 11 7 , 100

XL-OMY0001

/40 200/50 / AC200V 800/40 800/50 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150

IDUS/IDFS

) 258-9200-www.stevenengineering.com kg 35 27 kW 5.5 11 JIS Symbol Note 1) Select an air dryer according to the selection method and note the rated conditions.

ZSE2/ISE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX or ZR ejector system.