2/3 Port Valve

C.O. 4 220V AC 50/60Hz Valve size 1 to 4 1 6A 8A 10A 5 1 8 1 4 3 8 24V DC 12V DC 240V AC 50/60Hz 7 6 7 8 11 15 11 Other 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 25 4 20A 3 4 Valve size 5 to 7 25A 1 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange Electrical entry/Indicator light and surge voltage suppressor Grommet Grommet with surge voltage suppressor Grommet terminal Grommet terminal

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

IDX-OM-W026

2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-

CXS

10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

CXS

10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

: 0.5 MPa 1500 Inlet pressure: 0.5 MPa 1000 10, 11, 12 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 12, 13 1000 08, 09 10, 11 06, 07 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations The numbers above the flow rate characteristic curves in the charts show the applicable tubing outside diameter as defined by the product number.

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at retraction end Stroke adjuster at extension end KA 18.5 8.5 5 K 18.5 8.5 4.75 Vacuum suction port M5 x 0.8 5 NA x M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2 x M5 x 0.8 4H9 ( ) depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 ( ) depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9

Thermo-chiller/Rack Mount Type

5 !9 !6 !7 @0 @1 !8 No.

Table of Contents

Operating Range Bore size (mm) Auto switch model 32 25 20 16 10 6 7 7 6.5 5.5 3.5 3 5 5 5 3.5 2.5 2.5 D-A9/A9V 14 12.5 11 9 6 5 D-M9/M9V D-F9W/F9WV Since this is a guideline including hysteresis, not meant to be guaranteed. (assuming approximately 30% dispersion.)

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

Auto Switch Guide

Main circuit of switch OUT Black Weight DC () Blue (g) D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Auto switch model D-Y7PW, D-Y7PWV 0.5 11 11 11 Lead wire length (m) 3 54 54 54 DC (+) Brown 5 88 88 88 Main circuit of switch Main circuit of switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw Indicator light DC () Blue 3.4 2.5 D-Y7BW, D-Y7BWV SMC SMC 6.2 5 29 OUT (+) Brown Most

3 Port Solenoid Valve/

pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 5 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

T

(mm) 8 6.5 5 4 Inner tubing I.D.