HRX-OM-X084

8.4.1 Replacing Particle Filters .8-13 8.4.2 Replacing the DI filter (Option DM) .8-13 8.5 Electrical schematic diagram . 8-16 8.5.1 HRR010-A/W-10.8-16 8.5.2 HRR010-A/W-20.8-18 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR010-A-10/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-

HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

air-filter-e

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

Air Preparation Equipment

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

CLS

+ 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

Bore Size: 20mm, Port Thread: Rc, Stroke: 150mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m Lead Wire)

Bore Size: 20mm, Port Thread: Rc, Stroke: 150mm, Adjuster: w/o Adjuster, Function: Standard, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m Lead Wire, Number: -, Stroke Adjuster: -

MHY2/MHW2

Work weight: 0.05kg Example 25 Pressure 0.6MPa 20 0.5 0.4 Holding force (N) 15 13 0.3 10 0.2 5 0.1 Ex.)

Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

EXxx-OMZ0016

Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system

Rotary Table/

Measure B Moment of inertia (kgm2) Size 7 3 2 1 0.0001 0.001 0.01 0.1 MSQB7A MSQB3A MSQB2A MSQB1A 1 0.2 0.3 0.4 0.6 0.5 1.0 0.9 0.8 0.7 Rotation time (s/90) Model With external shock absorber Full size (Picture of MSQB1A) With internal shock absorber 73.5 50.5 60 56 A 34.5 41 30 28 A B For high energy 34.5 30.5 28 25 C For low energy With adjustment bolt 20.5 23 18 16 D mm Mass (g) 70 105 150

End Lock Cylinder Series CBG1

) 164 159 (168) 173 50 40 17 78 59 (25) (13) 187 182 (194) 199 63 40 18 78 72 (25) (13) 187 182 (194) 199 80 52 10 80 59 213 207 (221) 229 100 62 7 80 71 213 207 (221) 229 Dimensions inside ( ) are for long strokes.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

HRX-OM-X071

9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels . 9-16 9.8.1 Locations of Hazard Labels . 9-16 9.9 Daily Check . 9-17 Chapter 10 Product Warranty . 10-1 HRR Series HRX-OM-X071

S070

3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252

CG5-S

40 44 to 800 M14 x 1.5 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth