MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

ZP

Form w 1 Material e Vacuum inlet r Width across flats J A Connection thread Width across flats L 10 A8 37.5 12.5 10 2 M8 x 1 15 12 4 12 10 2 13 16 38 13 10.5 N S U F GN GS 20 25 A10 48.5 15.5 12.5 2 M10 x 1 20 14 3 16 12 3 32 49 16 13 40 A14 51.5 18.5 12.5 2.5 M14 x 1 20 19 4 21 19 5 50 52.5 19.5 13.5 ZP T F B5 D2 Width across flats K 30 (Rotating angle) 1 N: NBR, S: Silicone rubber, U:

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 12.7 10 10 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 13.5 12.7 13.5 17 18 17 18 21 22 21 22 22.4 25.2 6.2 11.8 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8 19.8 19.8 26.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

Table of Contents

Refer to Connecting to other series on page 16-3-21.

CJ2

3 !

ZX

Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

16" 1/4" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 11.4 12 9.3 11.4 13.2 11.4 13.2 15.2 13.2 15.2 17.9 17.9 21.7 12.7 12.7 10.5 10.5 13.5 12.7 13.5 17 18 17 18 21 22 21 22 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 22.4 25.2 6.2 12.3 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1

Series 10-, 21- AW-B Filter Regulator

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model Port size 1/4, 3/8, 1/2 3/4 3/4, 1 Pressure gauge port size 1/8 Fluid Air 5 to 60C (with no freezing) Ambient and fluid temperature Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) : For thread type: NPT only 1075 A 1021-AR-B Regulator 1021-ARK-B Regulator with Backflow Function Standard Specifications 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size 1/8 Air Preparation Equipment Pressure Control

Battery-less

3 !2 @0 @1 !7 !5 !0 t @3 Component Parts No.

MXQ

6.5 6.5 7 7 3H9 depth 2.5 +0.025 0 12 1 B A NN-M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 48 58 68 86 96 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-

MGP

6 M8 x 1.25 16 21 97 102 140 20 17.5 55.5 12.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 11 49 6 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E HN (max.)

CG5-S

-02 R 1/4 10 -03 10 R 3/8 KGV12-03 R 3/8 12 -04 R 1/2 12 16 21 One-touch Fittings/Stainless Steel Series Plug-in "Y" KGU Branch Tee KGT Applicable tubing O.D.

42

2 x 5.6 Mounting hole 2 x 5.6 Mounting hole 30 45 Manual override 129 91.5 41.3 32 30.6 27 78.8 41.3 32 30.6 27 PE X PE X R1 R2 P R2 P R1 14.5 14.5 19.5 (21) 19.5 (21) 1/8" External pilot port 1/8" PE. port 31 31 1/4", 3/8" 19.5 (21) 19.5 (21) 1/8" PE. port 31 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/4", 3/8" 1(P), 4(A), 2(B), 5(R1), 3(R2) port : Values for 3-position ( ): Values for 3/8

Free Mount Cylinder

F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

VM

3 !

Tie-rod Type Hydraulic Cylinder

23 17.5 19.5 22.5 24.5 13 15 11 13 17 19 11 13 15 17 11.5 13.5 14 16.5 11 13 CHN 63 23.5 24.5 20 21 25 26 13.5 14.5 19.5 20.5 13.5 14.5 17.5 18.5 13.5 14.5 80 23.5 26.5 20 23 25 28 15.5 18.5 13.5 16.5 19.5 22.5 13.5 16.5 17.5 20.5 14 17 16.5 20 13.5 16.5 CHM 100 27 31 23.5 27.5 28.5 32.5 19 23 17 21 23 27 17 21 21 25 17.5 21.5 20 24.5 17 21 Note 1) The auto switches listed below cannot

REA/REB

3 !2 y r @4 !4 !5 @9 #2 !8 @8 t u !0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) (A) 2(A) 2(A) 2 2 3(R) (P)1 3(R) (P)1 i i 1 (P) 3 (R) 1 (P) 3 (R) u u Component Parts Replacement Parts No. 1 2 3 4 5 6 Description Body Piston plate End cover Piston Spool valve assembly Spool spring Description Sub-plate Note) Note White White White Note Aluminum die-cast Part no.