51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

CNG

Bore size (mm) Mounting bracket Bore size (mm) Auto switch model 20 25 32 40 20 25 32 40 Axial foot D-C7/C8 CNG-L020 CNG-L025 CNG-L032 CNG-L040 BMA2-020 BMA2-025 BMA2-032 BMA2-040 D-H7 Flange CNG-F020 CNG-F025 CNG-F032 CNG-F040 D-B5/B6 Trunnion pin CG-T020 CG-T025 CG-T032 CG-T040 BA-01 BA-02 BA-32 BA-04 Clevis D-G5NTL CG-D020 CG-D025 CG-D032 CG-D040 Mounting screws set made of stainless

Series 10-, 21- AF-A Air Filter

70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Vacuum Filter AFJ Series

104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

AC Servo Motor Driver (Pulse input type/Positioning type)

I/O Signal Allocation . 42 5.5.3 Signal Allocation using Setup Software . 43 5.5.4 Allocation Examples for Position Control Mode (Pulse Input) . 44 5.5.5 Setting a Maximum of 7 Points using the Point Table in Positioning mode (Point Table) . 46 5.5.6 I/O Signal Allocation Check . 50 5.6 Positioning Mode in Setup Software . 51 5.6.1 Positioning Mode . 52 5.6.2 Motorspeed Configuration . 53

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

AC Servo Motor Driver (CC-Link Type)

Positioning Mode in Setup Software . 46 5.6.1 Positioning Mode . 47 5.6.2 Motor speed Configuration . 48 5.6.3 Acceleration/deceleration Time Configuation . 49 -1- 5.6.4 Move distance Configuration and Operation . 50 5.7 Positioning (Point Table) Operation using the Setup Software . 51 5.7.1 Point table List . 51 5.7.2 Point table Data . 52 5.7.3 Point table (Target position) Configuration . 53

AC Servo Motor Driver (CC-Link Type)

Signal ON Selection Parameter Configuration . 42 5.5.2 Initial I/O Signal Allocation . 45 5.5.3 Signal Allocation using Setup Software . 45 5.5.4 Allocation Examples . 46 5.5.5 I/O Signal Allocation Check. 48 5.5.6 Parameter setting when using it by I/O signal (CN6 connector use) . 49 5.6 Positioning Mode in Setup Software . 51 5.6.1 Positioning Mode . 52 5.6.2 Motor speed Configuration . 53

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

Power Valve: Economy Valve Series VEX5

Grommet (G) 4 x M6 Thread depth 12 2 x 112, 2 Port 2 (A), 1 (P) Silencer (P3) 2 Port 3 (R) For bracket mounting Refer to page 2449. 4 x 7 Mounting hole 243 (Air operated) Max. 22.5 Min. 14 2448 Power Valve: Economy Valve Series VEX5 External Pilot Piping Caution Refer to front matter 53 for Safety Instructions and pages 3 to 8 for 3/4/5 Port Solenoid Valve Precautions.

VXR21/22/23

. / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

Plug-in Unit

Note 2) The mounting position of the name plate is on the top face of the cover for the terminal block box. 01 1 station The maximum number of stations differs depending on the electrical entry. Cylinder port size Input block COM.

IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L, IDG50L Port size Symbol Bore Size V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 3 5 10 20 30 50 60 75 100 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Element service indicator is also available. Refer to Made to Order Specifications on page 14-19-48.

One-touch Fittings

S 1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

4-channel Flow Monitor ( compatible)

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65. However, if the panel mount adapter is hold enough with screw and the instrument is not seated correctly, water might enter.