Battery-less

400 Positioning repeatability [mm] 0.015 0.08 0.02 0.02 0.01 0.05 0.05 Drive motor Step motor V V V V V V V 8 V 16 V V V V V 25 V V V V V V V Size 32 V V V V 40 V V V 8 2 (6) 16 15 (4) 1 35 (8) 35 (7.5) 8 (12) Max. work load [kg] The values in parentheses are for when mounted vertically. 25 30 (15) 10 70 (30) 70 (29) 12 (20) 5 (5) 12 (4) Size 32 50 (20) 19 80 (43) 80 (41) 40 65 (23) 90 (53

Round Type Hydraulic Cylinder

LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53

Cylinder with Lock

Bore size [mm] Appropriate tightening torque of the lock unit holding bolt [Nm] 32 1.35 to 1.65 40, 50 4.7 to 5.7 63 11.3 to 13.7 80 22.1 to 26.9 100 37.8 to 46.2 53 MWB-UT Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

100

flow rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53

Vacuum Pad: Ball Joint Type

ZPT20F20 22 13 15 32 36 36 12.5 15.5 10.5 13 27.5 ZPT16F-B5 ZPT25F5 9 8 12 14 2 25 28 16 18 ZPT32F32 36.5 36.5 13 16 32 35 40 50 B8 01 ZPT F(Without buffer/Female thread) Hexagon width across flats P N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x 1.25 Model A B C D F NL P F P ZPT40F12.5 18.5 39 39 40 43 8 12 14 ZPT50F13.5 19.5 40 40 50 53

CRB2/CRBU2/CRB1

(mm) C2 F2 D1 G C3 A1 A2 B1 B2 B3 C1 D2 E1 E2 F1 R Model (size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 104 (120.5) 12 25 60 (61) 78 67 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 102 (136.5) 104 (120.5) 16 27.5 60 (61) 98 82 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 140 (155) 124 (139) 17 36 70 (71) 110 95 22 48 4 100 29 14 38 62 (63) 1/8 140 (155) 124 (139) 23.5 42.5 70 (71) 140 125

Table of Contents

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

LFE-OMZ0011

The operation for unlocking the key differs depending on the security code request [F81] (page 53).

HRX-OM-W038

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure

JXCx-OMY0006

Operation Instructions 53 13.1 Overview of the Operation Instructions 53 13.2 Operation procedure for Operation by Step No. 53 [1] Power on and Return to Origin position 53 [2] Positioning operation 54 [3] Pushing Operation 55 [4] HOLD 55 [5] Reset 56 [6] Stop 56 [7] Area output 57 13.3 Operation procedure for Operation by numerical instruction 58 14.

JXCx-OMY0004

Operation Instructions 53 13.1 Overview of the Operation Instructions 53 13.2 Operation procedure for Operation by Step No. 53 [1] Power on and Return to Origin position 53 [2] Positioning operation 54 [3] Pushing Operation 55 [4] HOLD 55 [5] Reset 56 [6] Stop 56 [7] Area output 57 13.3 Operation procedure for Operation by numerical instruction 58 14.

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

JXCx-OMT0030CN

166 . 53 167 . 53 3 - LEC-G Series/ 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:

Regulator

28 59.8 27.8 43 AR40-D 70 91.5 35.5 40.5 28 41.5 28 68.8 27.8 52 1/8, 1/4 M421.5 M381.5 1/4, 3/8, 1/2 1/4, 3/8 AR40-06-D 75 93 35.5 40.5 28 41.5 28 68.8 27.8 52 AR50-D 90 125 43 45 28 51 27.8 61.5 AR60-D 95 155 45 50 28 51 27.8 61.5 3/4 M421.5 3/4, 1 1 Model Optional specifications Bracket mount Panel mount Q R U AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53

Filter Regulator

of piping (Pressure gauge (Port size) port size) maintenance Clearance for Dimensions Optional specifications Model Round type Round type Round type Standard specifications pressure pressure gauge pressure gauge (Semi-standard: Z) (With color zone) gauge P1 P2 A B C D E F G J K J J J AW20-D 1/8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

-1A SX5000-53-1A For U side 5 Round head SY3000-23-4 M3X26(Matt nickel combination screw plated) 6 Gasket SX3000-57-4 SX5000-57-6 7 DIN rail VZ1000-11-1Refer to page 14 SY3000*-OMJ0003-A -22- Specific Product Precautions 16 Be sure to read before handing.

CG1

7 7 8 47 52 53 63.5 75.5 75.5 95 95 110 (118) 130 (138) +l 45 (53) 22 38.5 45 3.5 115.5 (123.5) 137.5 (145.5) +l 45 (53) 25 3.5 4 5 5 5 7 6.6 117.5 (125.5) 139.5 (147.5) +l 51 (60) 30 6.6 9 11 11 14 54.5 16.5 22 22 8.5 11 13 14 16 135 (144) 155 (164) +l 55 (67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55

MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.