7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

Table of Contents

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

ZX

Filter unit ZX1-K1-F Without switch and filter ZX1-K1 69.4 66.2 50.4 7 11 1 20 20 41 1 51 8 Bracket B (Standard accessory) 2-3.6 (Mounting hole) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 19 10 1 Filter M5 (or M6) (V port) Vacuum pad connection port 70 50 38 8 17 38 35.4 (Mounting hole) 2-3 (Mounting hole) 3 1 5.4 13-2-21 21 Series ZX Ejector exhaust Vacuum pad connection V port Air

7ND9071en

: 16 V DC, Ii: 52 mA 2 2-wire, AC voltage proximity switches: I32 OMRON E2E-X2Y1 U: 24-240 V AC, Imax: 200 mA 2 Dual module type proximity switches:: D33 SST Dual Module, NO 2 A 8-125 V DC, 24-125 V AC 1 D44 Namur Dual Module 3 mA; 1 mA, 6-29 V DC 1 DC/AC voltage micro switches: K05 OMRON D2VW-5 3 A 250 V AC, 0.4 A 125 V DC, 5 A 30 V DC 2 Number of switches: 2 Protection class of housing:

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

NCA1

/4 8 1/2 3/4 3/4 2 1 1/2 9/16 7 1/8 5 7/8 3 1/4 8 3/4 10 1 1/16 5 5/16 2 1/8 7/8 1/4 10 5/8 1 3/4 2 1/4 2 11/16 8 7/8 7 1/8 4 1/8 10 5/8 12 1 1/16 6 3/8 2 1/8 7/8 3/8 12 3/4 1 3/4 2 1/4 2 11/16 11 7 5/8 4 5/8 11 1/8 14 1 5/16 7 3/8 2 7/16 2 7/16 3/8 14 3/4 1 1/4 3/4 2 3/4 2 1/4 3/4 12 5/8 8 7/8 5 1/2 13 MS2 8 ~ 14 WITH SIDE LUG BORE ROD KK A B V W XS Y (MM) SM 8 1 3/8 1-14 1 5/8 2 1/4 7/8

Air Cylinder NCA1 Series

/16 1/4 8 1/2 3/4 3/4 2 1 1/2 9/16 7 1/8 5 7/8 3 1/4 8 3/4 10 1 1/16 5 5/16 2 1/8 7/8 1/4 10 5/8 1 3/4 2 1/4 2 11/16 8 7/8 7 1/8 4 1/8 10 5/8 12 1 1/16 6 3/8 2 1/8 7/8 3/8 12 3/4 1 3/4 2 1/4 2 11/16 11 7 5/8 4 5/8 11 1/8 14 1 5/16 7 3/8 2 7/16 2 7/16 3/8 14 3/4 1 1/4 3/4 2 3/4 2 1/4 3/4 12 5/8 8 7/8 5 1/2 13 MS2 8 ~ 14 WITH SIDE LUG BORE ROD KK A B V W XS Y (MM) SM 8 1 3/8 1-14 1 5/8 2 1/

Electric Actuators

18 Interface cable 7 9 8 Power cable 14 Power cable b View b View a a Wiring Signal description Cable description Color Pin no.

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

7

(V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5

CNS

PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 24 V 2-wire 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire 3-wire (NPN) IC circuit Terminal conduit Relay, PLC 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color

RSQ

N through 8-O counterbore V 10 (11) 20 (22) H + Stroke A + 2 stroke B + Stroke M 0.2 E Built-in One-touch fittings (20 to 50) Tubing O.D.QA Tubing O.D. 6 QB Q F Stroke 13 Built-in One-touch Fittings Stroke 20 8 Applicable tubing O.D.

AC

03 04 06 10 M5 X 0.8 AC2000 to AC4000 AC2010 to AC4010 AC2020 to AC4020 AC2030 to AC4030 AC2040 to AC4040 AF + AR + AL + V Residual pressure exhaust 3 port valve 1/8 1/4 3/8 1/2 3/4 AW + AL + V V AF + AR + V AF + AFM + AR + V AW + AFM + V Note 1) If indicating more than one symbol, place the desired symbols in alphabetical order.

CLS

8 !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

Stroke Reading Cylinder and Counter

V F Black 0 V G Shield 658 Stroke Reading Cylinder CE1 Series Construction 12, 20 32 @7 @4@8 @0 oi @3!