100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Cylinder

-I Z s . I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

High Vacuum Angle Valve, XL Series

Electrical entry Fitting size Grommet Conduit Terminal DIN terminal G C T D 2 3 1/4 B 3/8 B Refer to table 1 below for applications. Refer to Table 2 below for applications.

CQS

except "A", and "B".)

CNS

B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.

MQQ

D D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting (when using the cylinder tube threads) E t E t Compatible mounting bolt dimensions Model A type mounting B type mounting C (mm) D: Bolt length (mm) Mounting bolt size E (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D M4 x 0.7 35 + Stroke

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MHZ

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

IDX-OM-W094

12 T T 12.1 12.2 z z AC240V / DC24V 5A() / 2A() DC20V 3mA IDFA60/70/80/90 Series 12-1 IDX-OM-W094 T 12.3 AC230V z ON z A(4-5) B6-7 z A4-5A B6-7B z 3 5 /() z OFF 3 z OFF 6.2 IDFA60/70/80/90 Series 12-2 IDX-OM-W094 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

ENI 3 Position : NVJA332O-M3(-F) NVJA3420-M3(_F) NVJA3520_M3(_F) c 0.75(191 . r t Base Mounted Ifupe uith Subplate z rosition Sinsle : NvJA314o-M5 2 Posiiion Double : NVJA324O-M5 dtt l5+trEl e f,3 + t . q l l ' D i i @, s T ' t t s I i t o # L .-:r, , .r.r, ., ,, , 3 Poition : iWJA334GM5 NVJA34405 NVJA354GM5 0.04(l )Dia 2 ports

o

ENI 3 Position : NVJA332O-M3(-F) NVJA3420-M3(_F) NVJA3520_M3(_F) c 0.75(191 . r t Base Mounted Ifupe uith Subplate z rosition Sinsle : NvJA314o-M5 2 Posiiion Double : NVJA324O-M5 dtt l5+trEl e f,3 + t . q l l ' D i i @, s T ' t t s I i t o # L .-:r, , .r.r, ., ,, , 3 Poition : iWJA334GM5 NVJA34405 NVJA354GM5 0.04(l )Dia 2 ports World Wide QS\E Support...

o

ENI 3 Position : NVJA332O-M3(-F) NVJA3420-M3(_F) NVJA3520_M3(_F) c 0.75(191 . r t Base Mounted Ifupe uith Subplate z rosition Sinsle : NvJA314o-M5 2 Posiiion Double : NVJA324O-M5 dtt l5+trEl e f,3 + t . q l l ' D i i @, s T ' t t s I i t o # L .-:r, , .r.r, ., ,, , 3 Poition : iWJA334GM5 NVJA34405 NVJA354GM5 0.04(l )Dia 2 ports World Wide QS\E Support...

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Cylinder with Lock Series CNS

CNS Dimensions Center trunnion type/CNST Z + 1/2 stroke Rc(PT) BQ M 2-MA Effective thread depth R GA GB CL 4-J 2-Rc(PT) P Cylinder port Plug with breathing hole BC element FA T GL GR Rc(PT) BP Unlocking port G G Width across flats KA MM R1 Q V TD e8 D EA E TY VA BN AL A K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke (mm

Title not found

r G;-:--t tL , y\a :-/Fr .

CNG

t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.