VCC mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.
VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.
L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T O O R D E
Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"
X465 Body size ARP Accessory 1 2 3 IR1000 series IR2000 series IR3000 series Nil B G Note 3) None With bracket With pressure gauge IR-A IR IR Type of setting 0 1 Note 1) Basic type (Knob) Air operated type Application Port size IRV Size Symbol IR1000 IR2000 IR3000 Set pressure range VEX 01 02 03 04 1/8 1/4 3/8 1/2 For IR1000/2000 series 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa 0
5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)
AS131FM(3/16"), AS231FM(3/16", 3/8") is brass. !3 !2 q o !4 !7 !5 15-9-59 4 Series AS-FM Dimensions: Elbow Type M5 type U10/32 type Applicable tubing O.D. d Applicable tubing O.D. d H H (Hexagon width across flats) (Hexagon width across flats) A L4 A D1 L4 D1 L3 L3 M1 M1 T D2 L1 D2 L1 T L2 L2 Metric Size A L4 Weight (g) d T Model M1 D2 L2 L3 D1 L1 H Min. Min. Max. Max.
SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.
2 1 Interior purge Package SRH Clean booth Class 100 Package 856 Clean Regulator SRH Series ARJ How to Order AR425 to 935 ARX 02 SRH 3 0 0 0 AMR Gauge port orientation ARM Body size 3 4 1/4 3/8 Nil: Standard ARP OUT IN Washing grade IR-A 0 1 Grade A Grade B Knob Gauge port IR R: R Specification Set pressure Gauge port 0 1 IRV 0.02 to 0.2 MPa 0.05 to 0.7 MPa OUT IN VEX Relief mechanism There
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.
Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2
") 2 NCDQ8A(B)-100T(M) NCDQ8A(B)-200T(M) 1 0.37 (3/8") 0.25 (1/4") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 0.37 (3/8") 0.37 (3/8") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 2 47 Series NCQ8 Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch D-A9 (V) Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures
symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 4 (A) JIS symbol 3 position closed center (A) 4 (B) 2 2 (B) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center with back pressure check valve 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 3 position closed center/exhaust
8 16 (0.9) 18 (1) 02 03 VFA31402 position single 0.31 1 8 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA32402 position double 0.33 1 8 Body ported 1 4 3 8 12.5 (0.7) 14.5 (0.8) 02 03 VFA3340-X1 3 position closed center 0.48 1 8 JIS Symbol 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA3440-X1 3 position exhaust center 0.48 1 8 2 position double 2 position single 1 4 3 8 12.7 (0.7) 8.2 (0.45) 13.3 (0.75) 8.7 (0.5) 02
1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.