Modular Type Air Filter Series AF

Note 5) Without a valve function. Note 6) For thread type NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.)

4-channel Flow Monitor ( compatible)

Incorrect internal data processing of the product (Er0, 4, 6, 8, 40) Check if there is a noise source nearby.

Quick Exhaust Valve Series AQ 1

In-line type 04 06 07 4 6 1/4" With exhaust port fitting With One-touch fittings Note) Brass parts are all electroless nickel plated. Caution Be sure to read before handling.

AKH/AKB Series Check Valve with One-touch Fitting

00 Straight Type AKH 04 A 01 S Male Connector Type With sealant (standard) Not applicable to types M5 & 10-32UNF are not required.

VXZ

Rated voltage 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2232 2232 2242 2352 2362 4 5 6 7 8 9 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC for inquiry.) Refer to the table (1) given below for availability. Refer to page 17-3-65 for ordering a coil only.

Series IDG

When very clean air is required, install a separator as mentioned above on the downstream side, or instead of a regulator, use the order made specification (refer to page 35) fitted with a micro mist separator regulator (series AWD). 3.

With Factory Installed

Bowl a-ring NBR 11297 111512 111636 4D Valve a-ring NBR 1349247 131544 131645 CB a-ring NBR JIS B2401P5 JIS B240 1P5 Note) Bowl assembly of AW3001 and AW4001 are f,tted with a bowl guard(SPC) as standard. 8 Series AW Dimensions Panel mounting hole AW2001 ~ A W2001 : Max.3.5t 5 34 1 .4

VSA4

Port size Rc A/B EA/EB Pilot port size VA C [dm3/(sbar)] 13 16 13 16 13 16 13 17 b 0.24 0.32 0.24 0.32 0.26 0.25 0.18 0.30 Cv 3.3 4.2 3.3 4.2 3.2 4.2 3.0 4.3 b 0.15 0.31 0.15 0.31 0.22 0.27 0.18 0.39 Cv 3.0 4.1 3.0 4.1 3.5 4.2 3.6 4.6 1 2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440-06 1 8 Rc 2 position single SA 1 2 1.31 1 8 Rc 3 4 1 2 1 8 Rc 2 position

AS-FPQ/AS-FPG

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

A L1 Applicable tubing O.D. d 0 0 5 10 AS-DPP00092 AS-DPP00093 4 6 19.4 16 46.9 43.5 42.7 39.3 Number of needle rotations 624

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Description Material Note 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Knob POM 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 O-ring NBR 8 O-ring NBR 9 Cassette 10 Seal NBR 11 Bonnet A POM 12 Bonnet B POM 13 Gear POM 14 Indicator gear POM 15 Clip Stainless steel 16 Gasket NBR/Stainless steel q t r u i !6 !

99

Applicable for a wide range of liquids The element is applicable for a wide range of liquids because it adopts PTFE seals.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

One-touch Fittings

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 3 Metric Size One-touch Fittings KQ2-G Series Variations Bulkhead Union Hexagon Socket Head Male Connector KQ2E-G P.18 Use to connect tubing through a panel etc. P.6 KQ2S-G Internal hexagon socket allows tightening with a hexagon wrench in confined spaces. Extended Male Elbow Basically, it is used together with a male elbow.

SV

option L1 4 A 4 A 4 A 4 A 41 42 E 3/5 E 3/5 64.2 2 B 2 B 2 B 2 B (Station n) (Station 1) 77.5 1 P 1 P 78 E 3 P 1 Light/Surge voltage suppressor (6) Individual EXH spacer Individual SUP spacer MAX.14 109.5 SV100-06Interface regulator SV100-05Interface regulator (DIN rail dimension) 61.2 (47.3) 7.5 48 19.7 Block separation lever B B B B 102.9 111.4 118 100.4 91.9 A A A A B A B A B A B A Dimensions

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Table of Contents

screw, use a watchmakers screwdriver with a handle of approximately 5 to 6 mm in diameter.