CNG

301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20 25 32 40 M5 x 0.8 21.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) M6 x 0.75 26.5 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3

Cylinder with Lock Series CNG

301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ H e f h ZZ 20 25 32 40 21.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) 26.5 M6 x 0.75 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3

Rotary Actuator/Vane Style Series CRB2

K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSQ XA53 J J J J J J J XA55 J XA57 MSZ J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

Series VQ Base Mounted Metal Seal/Rubber Seal

A combination of J and N is unavailable. Note 5) Specify the wiring by means of the manifold specification form. (Except for L kit) Note 6) Indicate R for the valve with external pilot.

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Step Motor Controller

13 7 6 9 8 11 10 3 Connector B terminal no.

HRX-OM-T002

HRS090 Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OMT002 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.

SFOD-OMT0009CN

J K J K J K [mm] 12 8 12 8 12 7.5 [mm/s] 420 280 420 280 420 280 [mm/s] 30 20 30 20 30 20 () [mm/s] 38 25 38 25 38 25 () 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 K [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234) (4.642) (5.063) (6.205) (5.907) [mm/s] 80 80 100 100 120 120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10

SFOD-OMT0010

K J K J K Lead [mm] 12 8 12 8 12 7.5 Max. speed [mm/s] 420 280 420 280 420 280 Min. speed [mm/s] 30 20 30 20 30 20 (Independent and interpolation) Min. speed [mm/s] 38 25 38 25 38 25 (Speed tuning control) Supplement 1.7 Initial setting of LEH series Model LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 Lead symbol K Lead [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

New

F D 23 G1/2 Water For Air For Medium R E C C R E A B1 A B1 Vacuum For Oil Construction Dimensions Construction Dimensions 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 23 K K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4

CNG

7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201)

Modular F.R.L. Unit

115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

HRX-OM-M090

See note 4 for other conditions. 11 Dimension between panels. Projection is not included. 12 Weight when the circulating fluid and facility water (for water-cooled type) is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

LEC-OM02904

LE-CSB-SB 1 2 B1 B2 LE-CSB-RA ST-TMH-S-C1B-100-(A534G) CT160-3-TMH5B () LE-CSB-RB 11 10 11 (2) LE-CSB-RA LE-CSB-RB LE-CSB-SA LE-CSB-SB MR-BKS1CBLM-A1-H MR-BKS1CBLM-A2-H MR-BKS2CBL03M-A1-L MR-BKS2CBL03M-A2-L () AWG 20 B1 AWG 20 B2 . 11 11 11 11.1.5 SSCNET CN1ACN1BSSCNET SSCNETJIS C6802IEC 60825-11 (1) 0.15 0.3m 0.5m 1m 3m m LE-CSSL K J 1 3 (2) SSCNET LE-CSCNET 0.15m 0.33m 25mm

ZP

J Connection thread Width across flats H N S U F GN GS B3 M3 x 0.5 3 11 6 02 04 06 08 6 10 15 25 J K ZP T U A8 G B5 M5 x 0.8 5 13 8 Dimensions Per Vacuum Inlet: One-touch Fitting Model Vacuum inlet: Barb fitting G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

HRX-OM-W038

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

Programless controller (with stroke study) Step motor (servo 24 VDC)

17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.

HRX-OM-X027

Projection is not included. *11 Weight when the circulating fluid is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected. The weight will increase by 1kg when option L [Large capacity tank] is selected. The weight will increase by 2kg when option B [Earth leakage breaker] is selected. *12 In case option J [Automatic fluid filling] selected.

RB/RBL/RBQ

RB J D-X 20Data 10-18-11 11 Shock Absorber: Short Type Series RBQ Series RBQ/Shock Absorber: Short Type Technical Data: Model Selection Symbol 1.