Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

3 Port Air Operated Valve Series SYJA300

S : : P R 20 20 stations A A + + + + P, R port thread type R port A port size A port M5 x 0.8, C4 P port R P 1/8 M5 M5 x 0.8 P port Nil Rc A 1/8 1/8 C4 4 One-touch fitting F G R port N3 5/32" One-touch fitting N A port M5 x 0.8, C4 NPT 1/8 T NPTF Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

AIR COMBINATION

Note5) Note6) Y110-M5-A Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A Y610-03-A Y610-(03)-A VHS40-02A VHS20-01A VHS30-02A VHS50-06A Pressure relief 3 port valve Note6) VHS40-03A VHS40-06A Attachment VHS20-02A VHS30-03A VHS50-10A VHS40-04A E400-02-A E200-01-A E300-02-A E400-03-A E600-06-A Piping adapter Note6) E100-M5-A E200-02-A E300-03-A E500-06-A E400-04-A E600-10-A E200-03-A E300-04

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1/8 12 13.5 18.5 16 17 18.5 21.0 19 32 18.2 18.5 R 1/4 17 29.4 35.4 34.4 40.4 34 36 Reference dimensions for M5 and R threads after installation. 20.0 Inch Size A L4 Model Weight (g) M1 d D2 L2 L3 D1 L1 H T Max.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

Hydraulic

MA a A MA a Air release R (max.)

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

0 w u r e !2 Component Parts Description No. Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Particularly when using a resistor in parallel with a switching element and using a C-R element to protect the switching element, take note that leakage current will flow through the resistor, C-R element, etc., creating a possible danger that the valve may not turn off.

VS7-6

R.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

IDG

When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.

Compact Cylinder with Air Cushion Series RQ

The section marked with diagonal lines becomes a cushion chamber, and a cushioning effect is achieved. A A' A' R H R H e When air is supplied for piston extension, the check seal opens and the piston starts with no delay.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Series Appearance Size Metric size Inch size 1" 1 1/4" 6 8 10 12 19 1/8" 25 1/4" 3/8" 1/2" 3/4" 4 3 1 P.336 2 Union reducing LQ3U-R 3 4 : B side : A side 5 6 7 1 P.338 : A side Union elbow reducing LQ3E-R 2 3 4 5 : B side 6 1 P.340 Union tee reducing LQ3T-R 2 : B side 3 4 5 : C side : A side 6 Note) : A side tubing O.D. : B side tubing O.D. : C side tubing O.D. Tubing O.D.

LEC-OM07605CN

A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

Rotary Clamp Cylinders

0.15 17 17 10 0.07 0.15 2 x 4 x M6 x 1.0 4.5 C A R Q Through-hole/Both Ends Tapped Common (Standard) (mm) Clamp stroke 20 mm Clamp stroke 10 mm Bore size A B C Q R S Q R S 20 25 136.5 130.5 69 36 47 25.5 116.5 110.5 59 139 133 69 40 52 28 119 113 59 23 Rotary Clamp Cylinder: Double Guide Type Series MK2T Dimensions: 32, 40, 50, 63 E 4 x F A B E B D 10 D C A F C G Head End Flange (mm) With

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Universal type Port size in the cylinder side 4 6 8 12 10 (1) AS22 1FE-01 AS23 1FE-01 R 1/8 AS22 1FE-02 AS23 1FE-02 R 1/4 AS32 1FE-03 AS33 1FE-03 R 3/8 AS42 1FE-04 AS43 1FE-04 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.