Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n

15

Do not apply strong impact or an excessive moment while mounting the product or a workpiece. 2. When the product repeatedly cycles with partial strokes (100 mm or less), lubrication can run out. Operate it at a full stroke at least once a day or ev ery a thousand cycles.

MLGP

M6 x 1.0 M8 x 1.25 A, DB, E Dimensions: MLGPL (Ball bushing bearing) A, DB, E Dimensions: MLGPM (Slide bearing) A E A E Bore size (mm) 79.5 84 128.5 Bore size (mm) DB DB st 50 50 < st 200 200 < st 12 16 20 st 50 50 < st 200 200 < st st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 10 13 16 st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 51 51 58.5

MLGP

M6 x 1.0 M8 x 1.25 A, DB, E Dimensions: MLGPL (Ball bushing bearing) A, DB, E Dimensions: MLGPM (Slide bearing) A E A E Bore size (mm) 79.5 84 128.5 Bore size (mm) DB DB st 50 50 < st 200 200 < st 12 16 20 st 50 50 < st 200 200 < st st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 10 13 16 st 30 st 50 30 < st 100 50 < st 100 100 < st 200 200 < st 350 51 51 58.5

High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

C95

9 i *1 *1 C95K32 A A-A A !2 !

Stability of suction position,

8 11.5 Rc1/8 11.5 6 6 6 A-A A-A 24 33 40 79 21.5 30.5 40 76.5 22 22 A A A A 26 26 32 32 11 11 50 61 53.5 56 25.11) 7 5 22.61) 4 4 30 (Rotating angle) 30 (Rotating angle) 83 80 103 100 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-YF80UMl-B12 172 170 188 ZP3E-YF100UMl-B12 210 207 236 ZP3E-YF125UMl-B12 18 M12 x 1.75 Rc1/8 11.5 56 25.11) 7 A-A 24 33

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direction. o n t a a r t i o n n o i r t a a n t g o e R 11-7-46 47 Series CRA1 Made to Order Specifications: -XC59 to -XC61: Change of Port Location (Size 30 to 100) -XC62: Reverse Auto Switch Mounting (Size 50 to 100) Please consult with SMC for further information on specifications, dimensions

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

LG1H

Dimensions inside ( ) are for a 100 mm stroke.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) N.O. (A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 0.5 0.5 0.5 0.5 0.5 3 3 3 3 3 Slide screw S Lead screw type N.C. (B contact) N.C. (B contact) Lead screw lead N.C. (B contact) N.C. (B contact) 6mm 12mm A B N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50mm 75mm 100mm 125mm 150mm 170mm 200mm 50 75 100 125 150 170 200 N.O.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direction. o n t a a r t i o n n o i r t a a n t g o e R 11-7-46 47 Series CRA1 Made to Order Specifications: -XC59 to -XC61: Change of Port Location (Size 30 to 100) -XC62: Reverse Auto Switch Mounting (Size 50 to 100) Please consult with SMC for further information on specifications, dimensions

MNB

9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 80, 100 80, 100 Description Material Note Component Parts No.

MNB

1 $7 o $8 e B section C section #0 #1 A section !2 !2 !2 32 100 80 63 50 40 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

Tie-rod Type Hydraulic Cylinder

stroke 63 116 12 10 11 80 208 65 30 106 234 80 127 16 13 11 90 229 80 32 116 255 100 137 20 16 12 100 253 100 35 123 276 1/5 stroke 125 137 20 16 12 100 255 100 35 123 278 160 155 24 20 12 108 283 120 38 131 306 403 CHA Series Dimensions Single clevis type: CHAC V T 2 x Rc P Cushion adjustment screw CDH9 GA GB 4 x J Air release Width across flats G MM R (max.) d W D E W a MA A K F NA NB U

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

JIS Standard Hydraulic Cylinder

Hs D-A44 A A 49.5 Auto switch 376 Auto Switch Mounting CH2E/CH2F/CH2H Series Auto Switch Proper Mounting Positions CHQ D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA Note2) D-A9/A9V Bore size (mm) D-G39/K39 D-A5/A6 D-B5/B64 D-A3/A44 D-F5NT D-A59W D-B59W CHK CHN A A A A A A A A A A A 32 25 21.5 26.5 17 15 19 15.5 18.5 CHM 40 26 22.5