Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

IIIIIIIIII

Valve=5/32 OD Tube Push In FLOW RATE Cv=.06 Orifice=0.080 2.5 CFM @ 100psi SUPPLY CONSUMPTION Approx. 275 cc/min @30psi Valve Input 700 cc/min @ 100psi MATERIALS Pilot= Body..Polysulfone Diaphragm..Polyurethane Spring..Stainless Others..Nylon, Acetal Valve= Housing..Nylon Plunger..Aluminum Seals..Buna N Others..Brass OP.

CATALOG

216 T E C H N I C A L SPECIFICATIONS NON ROTATING A C C U R A C Y 40 MGQM 196 167 137 108 40 MGQL 88 59 275 216 Operation Double Acting Fluid Air Proof Pressure 1.5MPa / 218PSI Max Operating Pressure 1.0MPa / 145PSI Min Operating Pressure 12m, 160 : 12MPa / 18PSI 20 ~ 100 : 0.1MPa / 14.5PSI Ambient and Fluid Temperature -10 ~ 60C / 14 ~ 140F Piston Speed 12 ~ 63 : 50 ~ 600 mm/s / 2 ~ 24in

ISA2

L L L S S S L L L 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 20.5 Pressure gauge SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 5.25 DIN rail center L3 11.2 L4 24 L5 OUT 3 OUT 2 OUT 4 Left Right OUT 1 OUT 5 Stations 1 n Stations L1 L2 L3 L4 L5 1 106 120 135.5 2 144 38 162.5 173 3 182 38 76 200 210.5 4 220 76 114 237.5 248 5 258 114 152 275

Table of Contents

L L L S S S L L L 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 20.5 Pressure gauge SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 5.25 DIN rail center L3 11.2 L4 24 L5 OUT 3 OUT 2 OUT 4 Left Right OUT 1 OUT 5 Stations 1 n Stations L1 L2 L3 L4 L5 1 106 120 135.5 2 144 38 162.5 173 3 182 38 76 200 210.5 4 220 76 114 237.5 248 5 258 114 152 275

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

80 72.5 54.5 M plug connector (M) 56 61 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Indicator light 89 77 78 R 3 1 P : AC Equation L1=16n+11 L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250 260.5 14 235 246 275

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

1 : AC 93.5 86 M plug connector (M) R P 69.5(74.5) 300 (Lead wire) 86(87) 3 1 82.5(83.5) 98.5 Indicator light Cover dia 1.5 Cross section 0.23mm2 : AC Dimensions n: Stations (Max.20) Equation L1=20n+8 L2=20n+26 L n 2 48 66 87.5 98 18 368 386 412.5 423 19 388 406 437.5 448 20 408 426 450 460.5 15 308 326 350 360.5 16 328 346 375 385.5 17 348 366 387.5 398 10 208 226 250 260.5 11 228 246 275

MXS

MXS20L-10 MXS20L-20 MXS20L-30 MXS20L-40 MXS20L-50 MXS20L-75 MXS20L-100 MXS20L-125 MXS20L-150 169 223 275 3.11-33 Series MXS Dimensions MXS 25L/Symmetric style ZZ Z Basic style 62 0.5 55 15 M 4.5 (With stroke adjuster at retraction end) 2-M8 X 1.25 thread 15 deep 6H9 6 deep +0.030 0 N -1 X F 2 30 6H9 6 deep +0.030 0 6-M6 X 1 thread 10 deep 31 F (With stroke adjuster at extension end) FF 38

Clean Series: Relief Type, Magnet: Built-in Magnet, Mounting: Basic Style, Bore Size: 25mm, Port Thread: Rc, Stroke: 50mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m

Clean Series: Relief Type, Magnet: Built-in Magnet, Mounting: Basic Style, Bore Size: 25mm, Port Thread: Rc, Stroke: 75mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: -

Magnet: D (Built-in), Mounting: B (Basic Style), Bore Size: 25mm, Stroke: 200mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: HN (Rear End Lock Non-locking Style), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Mounting Bracket)