High Power Cylinder Series RHC 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3
With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36
22 Hastelloy C-22 316L SS PCTFE (Option: Vespel) Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat 50 0.34 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 Dimensions inch (mm) 20 0.14 AZ1400T 2.12 (53.8) 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P) 0 0.00 0 40 80 120 160 200 Flow rate (slpm, N2) AZ1400T 2000 psig (13.8 MPa) 200 psig
D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)
/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175
/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175
A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5
Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 3 DC () 4 OUT1 Unit: mm Stations 1 2 3 4 5 6 1: Conforming to ISO1179-1 (49) 45 L1 38 76 114 152 190 228 (3.7) 18 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 17 3-Color Display Digital Gap
AD27-D With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)
E C x 200 (= D) 25 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side.
N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.
IP63, JIS C 0920 Rainproof construction Except solid state switch with timer (D-M5TL, G5NTL/F7NTL/F5NTL) and magnetic resistant 2-color indication type solid state switch (D-P5DWL). D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
10 50 100 150 200 250 15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.
IP63, JIS C 0920 Rainproof construction Except solid state switch with timer (D-M5TL, G5NTL/F7NTL/F5NTL) and magnetic resistant 2-color indication type solid state switch (D-P5DWL). D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).
(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.
Plug for cylinder port Silencer for EXH port Double check block Individual SUP/EXH DIN rail mounting SY Built-in silencer SYJ Blank plate Name plate SX VK VZ VF Except for S kit Except for L kit Except for C kit Except for C kit Except for C kit Except for C kit VFR VP7 P.1.10-26 P.1.10-21 VP4 VQ Except for S kit Except for S kit Except for S kit Except for S kit VQ4 VQZ P.1.10-66 P.1.10-
Indication Item Setting and selection Setting range [High] Set the temperature range of the circulating fluid SP. +0.1 C to +10.0 C +1.0 C Upper/lower temperature limit (1) High/ Low [Low] Set the temperature range of the circulating fluid SP. -0.1 C to -10.0 C -1.0 C TEMP READY signal is output when the set time has passed after the circulating fluid temperature rises/drops within the
Basic Rc(PT)P Rc(PT)P GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5