CNG

to 49 st 50 st or more 15 to 49 st 10 st or more 50 st or more D-H7/H7W D-H7BAL/H7NF 10 st or more 15 to 59 st 60 st or more 15 to 59 st 10 st or more 60 st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 15 to 74 st 65 st or more 15 to 64 st 15 to 74 st 10 st or more 65 st or more D-B5/B64/G5NTL 10 st or more 15 st or more 75 st or more 75 st or more 10 st or more 75 st or more Courtesy

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

M3 x 0.5 (P, R port) 2 (Bracket) 15 11 10 P R 22.1 6.7 7 9.2 L plug connector (L): 10-SYJ32M-L-M3 M plug connector (M): 10-SYJ32M-M-M3 M8 connector (WO): 10-SYJ32M-WO-M3 58.5 [60.7] Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) 48.7 [50.9] 57.6 (2) 50.2 43.7 (2) (2) 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to page 646 for dimensions

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

CXT

D-F9W 12 A B W 16, 20, 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com W A B 32, 40 D-A9 D-M9 D-F9W Auto switch model D-F9BAL Symbol A B W A B W A B W Standard Stroke 12 16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

When entry of part numbers becomes complicated, indicate on the manifold specification sheet. 2-3-9 10 Series SQ1000 Valve Specifications Model Model Response time (ms)(2) Flow characteristic Series Number of solenoids Weight (g) 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Standard: 1 W Low wattage C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Single SQ1130 15 or less 0.14 0.11 0.63 0.14 0.10 0.62 12

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

MXW Series Long Stroke Slide Table

A Shock absorber and urethane bumper side Dimensions (mm) B A Adjuster bolt D Lock nut C M Adjustment range (mm) 5 Applicable size B A C Model D M 1mm 1mm 21 MXW-A812 8 2.5 6 M5x0.5 MXW 8 15 31 MXW-A812-X11 5 23.5 MXW-A1212 8 2.5 6 M5x0.8 MXW12 15 33.5 MXW-A1212-X11 5 28.5 MXW-A1612 10 3 8 M6x1 MXW16 15 38.5 MXW-A1612-X11 5 34.5 MXW-A2012 13 4 10 M8x1.25 MXW20 15 44.5 MXW-A2012-X11 5 40 MXW-A2512

Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

JXCx-OMT0061CN

. 15.1 [5m ] (1) (2 ) --A B-1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

MA Finger A B C D1 to 1.5 Attachment 1 to 1.5 Finger insertion groove A Lubrication/MHR2, MHR3 Opening/closing direction Max. tightening torque Nm Warning Cross direction Pin insertion hole Model Applicable bolt Attachment -10 -15 -20 -30 -10 -15 This product should be used without lubrication.

CE

Proper Auto Switch Mounting Position D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BAL D-F7BAVL/F79F Auto switch model D-A79W D-F7NTL D-A7 D-A80 D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) A B A B A B A B A B A B A B 12 40.5 4 41 4.5 38 2 46 9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5

CE

Bore size (mm) B A B A B A 12 11 78 12 79 8 75 20 15 85 16 86 12 82 Operating Range Auto switch model Bore size (mm) 12 20 10 3 D-A9/A9V 6 D-M9/M9V D-F9W/F9WV D-F9BAL 2.5 3 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Pin Clamp Cylinders

30 Diamond cut shape (Guide pin dia.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side 2 x 6H7 Depth 10 4 x M8 x 1.25 Depth 12 2 x Rc1/8 D Clamp arm Port side C A 45 49.5 B Hole diameter of workpiece C D d K SR Q Model number Hole diameter

Rotary Table/

bolt B adjustment amount Adjustment bolt B adjustment amount Adjustment bolt B adjustment amount 90 Rotation 90 Rotation 90 Rotation 15 Rotary Table Series MSQ Clean Series Prevents the particulates generated by the bearings from entering the clean room by vacuuming through the vacuum port on the side of the body.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 40.5 M Bottom view of MXQ25-75 13228 15 31 K 8 15 31 KA 22 50 65 0.5 52.5 8 55 Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W A B B B B B B A A A A A Hs Hs Hs Hs 20 25 32 40 50 63 80 100 35 Series MGG Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height/End Lock Type: With Rod End Lock A B 8.5 Hs 11.5 16 Auto switch D-C7/C8 D-H7 A B 12 Hs 14.5 Courtesy of Steven Engineering

Floating Joint

(mm) Model Order no. d: Thread nominal size H B C JS10-4-070 JS16-5-080 JS20-8-125 JS32-10-125 JS40-14-150 JS63-18-150 M40.7 3.2 8.1 DA00127 7 M50.8 4 9.2 DA00128 8 d M81.25 5 15 DA00036 13 M101.25 6 19.6 DA06 17 C M141.5 8 25.4 DA00186 22 M181.5 11 31.2 DA00188 27 H B D-X Technical Data 1157 JS Series Dimensions JS10, 16 M M Center of sphere U D J U F B C E G P H A R Use the precision spanner

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Hs Auto switch 12 15 Reed switches D-B5, D-B6 22.5 B A 33 113 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Proper auto switch mounting positions (mm) D-F5F D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-A59W D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-F5NTL D-B5, D-B64 Auto switch types D-B59W Bore size (mm) A A A B A A A B A B B B B B 40 21 10.5 14 11.5 14.5 17 22 23 11

Compact Cylinder with Air Cushion Series RQ

Rod end nut L1 Front flange type Front flange type/RQF, RDQF mm Bore size (mm) Stroke range (mm) A L L1 15 to 50 20 46.5 14.5 28.5 15 to 50 25 51.5 15 32.5 FV mm FX 8 Bore size (mm) B FV FW FX FZ B + Stroke L FZ A + Stroke 2-6.6 20 39 48 32 40.5 60 25 42 52 36.5 44.5 64 Rod end male threads (Only dimensions A, L, and L1 are different and other dimensions are identical.)