SMC Corporation of America
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Approx. 1.7 mm Colours Brown, White, Black, Blue Sheath Material Lead free heat and oil resistant PVC Finished O.D. 6 -66No.LV50***-OMQ0002-G Characteristics Chart Flow characteristics (pressure loss) LFE1 LFE2 0.02 0.02 P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n]

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting Vacuum port One-touch fitting 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36 (N)ZL112-E (ZSE4) (N)ZL112-EB (ZSE4B) (N)ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 8 Multistage Ejector Series

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Furthermore, the "90" and "180" designations of the rotary actuator bodies are approximate; they should be used for angle adjustments within 85 and 175, respectively. w All of the connecting port positions are on the body side. e The allowable kinetic energy is the same as that of the rotary actuator unit specifications. 0.2 to 0.7 MPa 0.15 to 1.0MPa 0.15 to 0.7MPa Operating press. range

P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36 ZL112-E (ZSE4) ZL112-EB (ZSE4B) ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 5 Series ZL Dimensions/Series

However, one station is used for the E type. There is a maximum of 10 stations, including the control unit mounting stations. Notes Applicable valves and options Part No. Quantity Part No. Quantity Order no. Clerk (code no.) Branch code Please copy this page for use as needed. 34 Manifold Specification Sheet Series VQ7-8 1.

BJ6-016S (A set of a, b, d, e) D-H7C 8 9 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 3 3.5 Switch bracket (Resin) Transparent (Nylon) Note 1) Band mounting c e Smooth Cylinders Low Speed Cylinders White (PBT) D-A9m/A9mV 6 6.5 Rail mounting D-A7m/A80/A7H/A80H D-A73C/A80C 8 9 d Switch holder (Zinc die-casted) b D-A79W 11 13 Auto switch mounting screw D-F7m/J79/F7mW/J79W D-F7mV/F7mWV/F79F D-J79C/F7BA

g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min]

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Differential pressure indicator e Seal washer order no.

F Pin hole a side a side Mounting tap: M12 x 1.75 Pin diameter: 10H7 Port Body (mounting side) C Port a side ( side) b side ( side) b side Clamp arm positioin (clockwise from top) Port a side : Mounting tap : Pin diameter : Mounting tap : Pin diameter D 180 from port Same direction as port b side Guide pin Port E 66 Port b side A C E Clamp arm Guide pin Clamp arm Port a side Mounting hole

Spacer Bolt Top cover Top Cover Mounting Bolt Tightening Torque Bore size Tightening torque 25, 32 0.46 to 0.60 lbfft [0.63 to 0.82 Nm] 2 CKZT -X2797 -X2798 Dimensions CKZT S-X2797 Clamp arm (Refer to page 5 for details.) 16 93 52 53 40 10 34 13 250.1 34 3 170.05 44 A 50.1 180.1 28 +0.1 0 C B Proximity switch 2 x 4 x M5 x 0.8 depth 6 G1/8 Unclamping port A D E G1/8 Clamping port Bore size

267 330 Foot: 231 207 253 L G 193 172 212 144 126 156 109 94 118 90 78 97 Rod side Frang e F Head side flange 433 386 476 Foot: 334 297 367 L G 281 250 309 210 185 229 160 141 175 134 117 129 8 - 5) Theoretical output Table 3.