CQS

Rubber bumper Standard stroke: None, Long stroke: Standard equipment Mounting Through-hole/Both ends tapped common CUJ Piston speed 50 to 500 mm/s CU CQS Clean Series (Standard stroke is only available.)

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

6For PROFIBUS DP K e For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !4For PROFIBUS DP Terminating resistor Plug (Male) K tFor CC-Link K oFor DeviceNetTM Socket (Female) K uFor CC-Link K !2For DeviceNetTM Connects to the communication port of the communication unit connected at the end K !3 K !8 K !

Power Clamp Cylinder

2 u y e i For Asia For North America For Europe For France Special r w !1 Replaceable Kits List Table 1 Contents Kit no. Bore size (mm) Description Code Opening angle 30 H e Switch holder y Proximity switch u Parallel pin i Sheet gasket !2 Cover cap screw 45 G 40 CKZT-S040 Note 1) T P Switch cassette 60 F 75 E 90 D q Stay o Spring washer !

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

3

2 q w e r t y !1 !0 o i u Component Parts No.

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Thermo-chiller

Right Left Rear Front w q Parts List e Part no. Applicable model No.

EXxx-OMV0017-D

Select (d) [Pairing mode] from (c) [Remote registration] on the (a) [Properties] tab and then click (e) [Reset module]. Base setting screen (e) (b) (a) (c) (d) A Base unit that supports CC-Link (EXW1-BMJA#) will change to pairing mode using the protocol set in "System setting".

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

Compact Cylinder

2 y q e !3 o !0 With auto switch (Built-in magnet) 32 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 r t i !4 y q e !3 o w u !0 !1 M: Rod end male thread Component Parts Replacement Parts: Seal Kit No. Description Material Note Bore size (mm) Kit no.

VZ100/300/500

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.

Multistage Ejector Series ZL112/212 1

P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label EJECTOR MULTISTAGE 59.5 59 56 8.5 30 Section A/ With Digital Vacuum Pressure Switch 4.5 166 175 36 ZL112-E (ZSE4) ZL112-EB (ZSE4B) ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (Mounting hole) 59 85 13-7-8 9 Multistage Ejector

MXS Series Air Slide Table

L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 10 420 E= ( ) =0.09 2 9.8 1000 V=1.4 x 300=420 Calculate kinetic energy E(J) of moment. Calculate allwable kinetic energy Ea(J). Check that kinetic energy of moment does not exceed allowable kinetic energy.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

SFOD-OMT0005CN

<> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

LECA6_C

ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

Lightweight and Compact

Description w q DI filter vessel (resin) w Mounting bracket Circulating fluid return port e DI filter inlet tube !0q r DI filter outlet tube t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet u DI control piping assembly e i DI sensor assembly o Nipple (2 pcs.) o !

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

MXW Series Long Stroke Slide Table

-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5