IR1000/2000/3000

Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) VY1 IR2020-02 IR2020-02 IR2020-02 Supply pressure 1.0 MPa Back pressure: 1.0 MPa 1.0 G 0.8 0.204 0.9 0.7 Set pressure P2 (MPa) 0.8 PPA Set pressure (MPa) Set pressure (MPa) 0.6 0.202 0.7 Set point 0.5 AL 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6

PFxx-OMP0001CN

NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420

PSxx-OMM0002CN

x n +4 x (n -1) -57No.PS-OMM0002CN-F A B C D E 4 OFF F SMC URL http://www.smcworld.com 2008-2014 SMC Corporation All Rights Reserved No.PS-OMM0002CN-F

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PFxx-OMJ0005CN

F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02

PFxx-OMO0004CN

[P_2][n_2][] [H_2][] [F 2] OUT2 OUT1 -40No.PF-OMO0004CN-E b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 OUT1 -41No.PF-OMO0004CN-E c. 0999,999,999 L 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -42No.PF-OMO0004CN-E d.

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

PSE550/300

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

IDX-OM-W029

mm 600 mm 600 mm 600 mm 600 mm ( ) IDU Series 2-1 2 1 IDX-OM-W029 2 2 2 2 6 6-3 IDF-AB501 14 1 IDU22E,IDU37E,IDU55E,IDU75E 2 2 3 80 80 OUT IN (IN) IDU-BP336 1 IDU22E (OUT) IDU-BP337 1 IDU37E 1 IDU55E IDU-BP338 1 IDU75E 2 2 4 10mm IDU Series 2-2 2 2 IDX-OM-W029 2 2 2 5 6-1 IEC AC230V [30mA 10AIDU75E 20A] AC200V [30mA 10AIDU75E 15A] 216AWG 812 3 () 1.25 0.2m 30m

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: G (Rear Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]