SMC Corporation of America
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Circuit for DC Circuit for AC Light A A() [+] SOL SOL C(+) [] C ZNR Light Due to the use of non-polar light, the VQZ series has no polarity. Refer to p.1.12-26 for latching style. Connection of Lead Wire (Not necessary if ordering lead wire pre-connected model.)

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

DC circuit AC circuit Indicator light A() [+] A SOL SOL C( + ) ZNR Indicator light [] C Locking type (Tool required) VQZ100 No polarity by adopting non-polar light. Connection of Lead Wire If the manual override is turned by 180 clockwise and the mark is adjusted to 1, then pushed in the direction of an arrow (), it will be locked in the ON state.

ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2 39.5 60 12 3.2 33.5 5.8 2 39.5 75 17 4.2 36.5 7.5 3 50 75 17 4.2 36.5 7.5 3 50 13-5-6 7 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Body Ported Type (Without silencer): ZH05D --to ZH15D --S L S L

D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle

Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

T Y P E F L AT W I T H R I B I: M6X1 I: M5X0.8 Y Model A B C D E F G H H Flat Flat with rib G ZPR10 U C 10 12 12 21 29.9 46 20 67 72 3 1.7 25 ZPR13 U C 13 15 12 21 29.9 46 20 67 72 3 1.8 25 ZPR16 U C 16 18 12.5 21.5 30.4 46.5 20 67.5 72 3.5 1.2 25 D E E P T Y P E I: M6X1 I: M5X0.8 Model A B C D E F Y G H H G ZPR10D 10 12 15 24 32.9 49 20 70 75 6 25 ZPR16D 16 18 16 25 33.9 50 20 71 76 7 25

-15D -20D -25D -30D -35D -40D -45D -50D CDQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40 45 50 55 60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x

Applicable bore size (mm) Snap ring l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 C type 3.2 C type 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 C type 5 C type 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7

(m) kilogram (Kg) 1 Kg = 2.2 lbs Volume* gallon (US gallon) liter (l) 1 US Gal = 3.71 l Temperature degrees Fahrenheit (F) degrees Celsius (C) C = 5/9 (F-32) Torque pounds (f) inches (lbs (f) in.) Newton-meters (Nm) 1 Nm = 8.88 lb(f)-in.

(m) kilogram (Kg) 1 Kg = 2.2 lbs Volume* gallon (US gallon) liter (l) 1 US Gal = 3.71 l Temperature degrees Fahrenheit (F) degrees Celsius (C) C = 5/9 (F-32) Torque pounds (f) inches (lbs (f) in.) Newton-meters (Nm) 1 Nm = 8.88 lb(f)-in.

Turn the manual override counterclockwise by 180 to set the E mark to "0", then it will be reset. 200V AC 220V AC Red Red 200V AC 220V AC Indicator light With light and surge voltage suppressor Circuit for DC Circuit for AC Light A () A (+) SOL SOL C (+) C ZNR Light () Due to the use of non-polar light, the VQZ series has no polarity.

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

Rubber seal Metal seal Rubber seal Single VS4 2 position Double VQ7 Closed center EVS Exhaust center 3 position VFN Pressure center Note) Values for 2 position single from the cylinder port to the exhaust (from 2 to 3 and from 4 to 5) C (Sonic conductance) and b (Critical pressure ration) are subject to ISO 6358/JIS B 8390.

set (Supplied with product) SRF Connected to VBA20A, 40A Connected to VBA22A, 42A ITV Tank IN port Rc1/2 IC Booster regulator IN port Booster regulator IN port C C ITVH ITVX EXH: C EXH: C (A) (A) D PVQ (B) (B) OUT OUT 355 Tank OUT port Rc3/4 VY1 256 256 205 4 x 13 4 x 13 VBA VBAT VBA VBAT 50 50 Drain valve Drain port Rc1/4 150 150 AP100 500 250 250 824 Booster regulator model A B C D VBA20A

100 Non-locking type Front lock CBQ2 Rubber bumper 32, 40, 50, 63 Rear lock Locking type Series CBQ2 How to Order B 50 D C 32 H L CBQ2 Standard A93 S B 50 D C CDBQ2 With Auto Switch 32 H L Number of auto switches With auto switch (built-in magnet) 2 pcs. 1 pc.