EXxx-OMN0029CN

kbps 0 1 1 2 500 kbps 0 2 2 3 : : : : PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON

EX510-GDN1.eng

(Removal procedure and ) Applicable message I/O message size Input: Max. 8 byte, Output: Max. 8 byte (Changeable by switch settings) 1 2 Baud rate 125 kbps 250 kbps 500 kbps 500 m or less Thick cable 250 m or less 100 m or less Max. length of Network 3 4 Thin cable 100 m or less 156 m or less 78 m or less 39 m or less Total extended cable length Note: Max. extended cable length is 6 m. 11

FC2W-X110

Flashing: Flashing cycle of 500 ms Not automatically recovered. Turn power off and then on again. 1.6 Over current 500 ms 500 ms 0 1.0 5.0 1.3 1.2 Input signal Voltage [V] Flashing: Two ashing cycles of 250 ms at two-second intervals Error automatically resets when the supply ow rate is recovered (LED goes off).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Precision Regulator

IR IR IRV VEX SRH Relief flow rate characteristics SRP Possible to relieve (exhaust) air ranged 50 to 4000 L/min (ANR) SRF Back pressure: 0.7 MPa Back pressure: 0.7 MPa ITV 0.7 IR2010 IR201 0.7 IR3010 IC 0.6 0.6 IR401 Set pressure (MPa) Set pressure (MPa) 0.5 0.5 ITVH 0.4 0.4 ITVX 0.3 0.3 PVQ 0.2 0.2 0.1 0.1 VY1 600 500 400 300 200 100 0 5000 4000 3000 2000 1000 0 VBA VBAT Relief flow (L/

IR1000/2000/3000

Superior relief flow characteristics Relief flow has been increased by nearly 5 times (compared to SMC IR201, IR401) Conditions: Back pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.7 IR3010 0.7 IR2010 IR201 0.6 0.6 IR401 Set pressure MPa Set pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 1000 0 5000 4000 3000 2000 600 500 400 300 200 100 0 Relief flow l/min (ANR) Relief flow l/min

MGZ Series

1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Air Slide Table Series MXQ

Rubber stopper Standard stroke (mm) Additional weight of adjuster option Metal stopper Shock absorber Model Axial piping type (S: Stroke mm) With end lock With buffer 20 30 40 50 75 100 125 150 10 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 5 10 100 120 140 180 200 25 5 6 13 + 0.2S 10 23 23 30 140 170 210 250

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

Rotary Cylinder Series MRQ Size: 32, 40 1

Rotary motion theoretical output Graph (1) Cylinder Output on the Extending Side (Double acting) (Nm) Operating pressure (MPa) Size 150 1500 0.15 0.3 0.3 0.4 0.5 0.6 0.7 Tube bore size [mm] 100 1000 32 40 0.34 0.45 0.68 0.90 1.13 1.36 1.58 40 0.64 0.85 1.27 1.70 2.12 2.54 2.97 40 50 400 500 Graph of Effective Output 32 CRB2 3 20 25 30 200 250 300 Operating pressure [MPa] Cylinder output F

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

T/TIA

Color KK130 T0604-250-X64 T0604-500-X64 200 200 475 475 52 52 120 200 5.1 9.4 Black, White D1 DM KDM KB D2 D3 W KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 463

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

Series AP3100

(P.1088) 1) Maximum operating pressure 2400 psig (16.5 MPa) for connection size 3/4 inch. 2) -10 to 90 C for Polyimide seat. 3) Figure of 1/2 inch connection. 4) Tested with Helium gas inlet pressure 500 psig (3.5 MPa). 5) Weight, including individual boxed weight, may vary depending on connections or options.

AMD

A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 x l 400 Anchor bolt M20 x l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

Digital Gap Checker

Detection nozzle: 1.5 Detection nozzle piping: F type 4 x 2.5 tube 1 m, 3 m, 5 m/G, H type 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa Test conditions ISA3-F ISA3-G 300 60 3 m 1 m 250 50 5 m 1 m 5 m Displayed value Displayed value 200 40 3 m 150 30 100 20 50 10 0 0 0.3 0.25 0.2 0.15 0.1 0.05 0 0.06 0.05 0.04 0.03 0.02 0.01 0 Actual distance [mm] Actual distance [mm] ISA3-H 500 450 3

Fieldbus System

and FE 500 VDC, 10 M or more between external terminals and FE Insulation resistance Note) Note) Except Handheld Terminals SI Unit (EX600-SPRlA) EX600-SPR1A EX600-SPR2A Model Protocol PROFIBUS DP (DP-V0) Device type PROFIBUS DP Slave 9.6/19.2/45.45/93.75/187.5/500 kbps 1.5/3/6/12 Mbps Communication speed Configuration file GSD file I/O occupation area (Inputs/Outputs) Max. (512 inputs/512

Fluoropolymer Tubing Variations

TH0604N Color KQB2 Translucent 250 m reel 500 m reel X64 KS KX Reinforced corrugated cardboard specification: Longer length reel/-X64 KM Dimensions KF Dimensions M Model D1 D2 D3 W Weight (kg) H/DL L/LL TH0604N-250-X64 TH0604N-500-X64 200 200 475 475 52 52 120 220 9.4 18.5 D1 KC KK D2 D3 W KK130 DM KDM KB KR KA KQG2 KG KFG2 MS KKA KP LQ MQR T T IDK 507 FEP Tubing (Fluoropolymer) Inch Size

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

For notes w and e, refer to the left. 4B/6B 870 M20 X l 500 AMD1000 w When the element has reached its replacement interval, replace it immediately with a new element.