3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Environment

1 !2 !

MU

138 150 180 187 MM M6 X 1 Depth 12 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 H 14 14 15 18 21 ZZ 83 86 90 110 117 M10 X 1.25 M8 X 1.25 Depth 13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 8 1 M8 X 1.25 Depth 13 8 1 M10 X 1.5 Depth 15 4 1 M10 X 1.5 Depth 15 M12 X 1.75 4 1 The

Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

30 M8 x 1.25 x 6L 6 30 1 Z 2-6.9 through 2-11 counter bore depth 6.3 28 (Hexagon socket head set screw) 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2-M6 x 1 (Through-hole) M6 x 1 x 18.5L and M6 x 1 2-M5 x 0.8 Thread depth 7.5 (Hexagon bolt)(Hexagon nut) M6 x 1 x 14L (Hexagon socket head cap bolt) 2M5 x 0.8 thread depth 4.5 Note) (Opposite side: Same) (Z) 30 8M5 x 0.8 thread depth 7.5 (Opposite side

CL

1 !2 !3 !4 !5 !6 !7 No.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 20.5 27.5 38 50 50 60 4.5 7.5 4.5 7 9 9 Note 1) Negative figures in the table D indicate how much the load wires protrude from the cylinder body.

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

40 80 50 50 20 20 Load mass m (kg) Load mass m (kg) Load mass m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

-- NCM seies

Cushion standard on 76 and l/a bore onlv {must include C if desired on these bore sizes). ultENstoNs r":-t _1-1,--lY+/ 075 {!a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

and fluid temperatures 14 to 140F [10 to 60C] (No freezing) Cushion Clamping side: None Unclamping side: Rubber bumper Operating time Clamping: 1 sec. or more, Unclamping: 1 sec. or more Max. allowable clamping moment 1 55 lbfft [75 Nm] 1 Refers to the maximum holding force (torque) while clamped with the operating air exhausted.

LEC-OM07605CN

1) (1) (1) 46.2 2 SD (1) (1) (1) 46 46.3 SD (1) (1) (1) (1) 46.5 3 DB (1) (1) (1) 46.6 4 DB (1) (1) (1) 47 47.1 SD 47.2 SD 50.1 1 SD (1) (1) (1) 50.2 2 SD (1) (1) (1) 50.3 4 SD (1) (1) (1) 50 1(1) 50.4 1 SD (1) (1) (1) 50.5 2 SD (1) (1) (1) 50.6 4 SD (1) (1) (1) 51.1 3 DB (1) (1) (1) 51 2(1) 51.2 3 DB (1) (1) (1) 8 4 8.

Air Fittings & Tubing

1 8 17 23 23 29 37 55 63 81 75 92 14 4 10.4 10.4 8 17 17 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 22 18.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 24 24 20.9 22 8 12 46.1 16.1 Reference dimensions after R(PT) thread installation.

LEC-OM02904

: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

-0 to -2100 -0.00 to -21.00 mA 0..10 V 0 to 1050 0 to 1050 +0.00 to +10.50 V 0..5 V 0 to 525 0 to 525 +0.00 to +5.25 V 1..5 V 75 to 525 75 to 525 +0.75 to +5.25 V 0..20 mA 0 to 2100 0 to 2100 +0.00 to +21.00 mA 4..20 mA 300 to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.