Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

LEC-OM02904

MBR 3. 1. 2. 3. 2. 8 25 9 9 . 2 9.1 . 2 9.2 . 4 9 1 9 9 9.1 (1) LECSS-S5LECSS-S7 [mm] 4 40 (80) 135 6 6 6 6 () P C D L11 L21 L1 L2 L3 N P1 P2 U V W CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 () L3 N P1 CNP2 P2 161 P 168 C D 156 L11 CNP3 L21 U V W CHARGE 6 6 (14) (25.5) (68) LECMR-J3BAT MR-J3BAT 0.8[kg] .

AC Servo Motor Driver (CC-Link Type)

Click Save. -68- 5.10.2 To Load saved Point table From the Point table window in the setup software, select Open. Please specify location of the file. Please select the file you wish to import point table [.ptb2]. Click Open.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

α PneuAlpha HARDWARE MANUAL

at 25C (by capacitor) RTC Accuracy 5 seconds / day Operating Temperature 0 55 C Storage Temperature (-30) 70 C Dielectric withstand voltage 3750V AC > 1 min per EN60730-1 between the following points: Power/Input Terminals and Relay Output Terminals Relay Output Terminal and Relay Output Terminal All Terminals and the DIN 43880 Control box or equivalent Shock Resistance Con forms to IEC 68

IR1000/2000/3000

66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/2 Port size 2-Rc 1/8 Pressure gauge port 14-5-9 9 Series IR1000/2000/3000 Series IR1000 Relief Characteristics Pressure Characteristics Flow Characteristics Testing methods conform to JIS B 8372.

VCA

71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5 Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order

,

21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68

VHK

19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-02S-12F VHKl-03S-06F 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 VHKl-03S-08F VHKl-03S-10F 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-03S-12F VHKl-04S-10F 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5

ZX

Operation stop 13-2-68 68 Series ZX Made to Order Specifications: Please consult with SMC for detailed specifications, size and delivery. ZX ZR Combination Symbol: J3 Combination Symbol: D2 ZM An N.C. solenoid valve is used as the supply valve. A vacuum release valve is not used. An N.C. solenoid valve is used for the vacuum release valve. An external supply valve must be provided.

Series CM3 double acting, single rod cylinders are a fully functional, compact cylinder used for space saving designs.  The CM3 series offers a variety of mounting options and is auto switch capable.  The CM3 is now RoHS compliant.Double acting, single rod , Bore sizes; 20mm, 25mm, 32mm, 40mm , Strokes from 25mm through 300mm , Mounting: basic, foot, flange, clevis, trunnion, RoHS compliant

Series CM3 double acting, single rod cylinders are a fully functional, compact cylinder used for space saving designs.  The CM3 series offers a variety of mounting options and is auto switch capable.  The CM3 is now RoHS compliant.Double acting, single rod , Bore sizes; 20mm, 25mm, 32mm, 40mm , Strokes from 25mm through 300mm , Mounting: basic, foot, flange, clevis, trunnion, RoHS compliant

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

N, IRV, "REGULATOR, N lb

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 8.07 in / 205 mm Width: 5.98 in / 152

Thomas Oil-less Articulating Piston Compressor Flow Rate: 2.4 CFM / 68 LPM , 2.4 CFM / 68 LPM, Max Pressure: 175 PSIG / 12.1 bar , 175 PSIG / 12.1 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 115 / 230, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 14.3 in / 363 mm Width: 11.2 in / 284 mm Height: 6.95 in / 177 mm

Flow Rate: 2.4 CFM / 4.2 m3/hr / 68 LPM , 2.4 CFM / 4.2 m3/hr / 68 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .2, Voltage (60 Hz): 230, Voltage (50 Hz): 230, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 14.33 lbs. / 6.5 Kg Series Configured Datasheet.

Speed Controller with Indicator

9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (63) AS421FS-04-16 (S) 16 23.8 34.8 47.7 (47.6) 32.7 20.6 68

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

7 1.5 AS2051F-08T 8 15.2 59.8 8.1 36.5 18 AS2001F-07T 1/4" 36 13.2 52.2 7.1 33.7 17 19 AS3001F-06T 6 12.8 59 7.4 45 17 56 AS2051F-05T 3/16" 11.4 52.2 6.2 34.9 16.5 35 AS3001F-08T 8 15.2 64.4 8.2 45.8 18 60 AS2051F-07T 1/4" 15.5 7 1.5 13.2 54.4 7.1 35.7 17 33 20.6 9.5 1.5 AS3001F-10T 10 18.5 71.6 9.8 47.3 21 64 AS2051F-09T 5/16" 15.2 59.8 8.1 36.7 18 36 AS3001F-12T 12 20.9 76 11 48.5 22 68

Basic Type/Direct Mount Type

38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 M 3.5 4 5 5 6 7 8 10 10 Z 66 76 94 107 117 130 148 176 188 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68