RSH

(Resin or rolled steel) LVariation Standard stroke (mm) Bore size (mm) Series Mounting Action Rod end configuration Standard variation Built-in magnet Locking Cancel cap Proximity switch Option 15 20 30 40 20 32 50 63 80 P P P P P P P P P P P P P P P P P P P P P P P P P Double acting Lever style Double acting with spring RSH Flange Adjustable Single acting 4.3-1 Heavy Duty Stopper Cylinder

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Precision Regulator

0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

10.5 11.5 5 5 10 11.6 3 1 3 1 21.5 <30.9> 27[34] 25 + + + + + L2 3 (For mounting) 2-3.5 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.4[34.6] L1 <34.6> (Lead wire length) (Light/surge voltage suppressor) (Station n) (Station 1) 2 2 13 7.7 (Pitch) P=10.5 10.5 (2 port) M5 x 0.8 L plug connector (L) M plug connector (M) 32.5[34.7] <34.7> 11.6 38.1[45.1] <42> 42.3[44.5] <44.5> 27.5

MXQ

Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

IIIIIII

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

ITV

Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000 AF4000

Modular Type Filter Regulator Series AW

Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.

MY2

M5 x 0.8 1/8 1/4 "P" indicates cylinder supply ports.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

P port on both sides and exhaust from EA/EB port on both side.

LEC-OM07605CN

(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Possible to transfer a workpiece at low-speed.

MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

3 position 0-1OOPSl (0-7kSf ,/cm,) Operating pressure range 6 g 70 E E 60 2 position single P-100PS| (P-7ksf/cm,) P:Supply pressure 50 Pilot pressure range 2 position double 14-100 (1-7ksllcm?)

VCA

How to find the flow rate for air/ Flow rate formulas based on the air temperature of 20C For subsonic range where P + 0.1013 < 1.89 (P + 0.1013) Q = 226S P(P + 0.1013) For sonic range where P + 0.1013 1.89 (P + 0.1013) Q = 113S (P + 0.1013) Q : Flow rate [l/min(ANR)] S : Effective area (mm) P : Pressure drop P P (MPa) P: Upstream pressure (MPa) P: Downstream pressure (MPa) How to make