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Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

(Value in the initial. stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF.

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

(Values at the initial period) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF.

The drain pipe for the air filter in the D. P . Lube Unit must have a minimum pipe bore of 10, and a maximum length of 5 m. Avoid using a riser pipe because it could cause the auto-drain to malfunction. 2. If installing an air tank, install it on the IN side of the D.P . Lube Unit.

Table (1) Indication of Flow Characteristics Corresponding equipment Indication by international standard Other indications Standards conforming to ISO 6358: 1989 JIS B 8390: 2000 C, b Equipment for pneumatics JIS B 8390: 2000 Equipment: JIS B 8373, 8374, 8375, 8379, 8381 S Cv ANSI/(NFPA)T3.21.3: 1990 Av Equipment for controlling process fluids IEC60534-2-3: 1997 JIS B 2005: 1995 Equipment

With the use of D-sub output blocks, a maximum of 9 remote D-sub manifolds can be attached to one EX600 communication module. This serial interface is compatible with series SV1000/2000/3000, VQC1000/2000/4000, S0700 and the new SY series valves.

With the use of D-sub output blocks, a maximum of 9 remote D-sub manifolds can be attached to one EX600 communication module. This serial interface is compatible with series SV1000/2000/3000, VQC1000/2000/4000, S0700 and the new SY series valves.

With the use of D-sub output blocks, a maximum of 9 remote D-sub manifolds can be attached to one EX600 communication module. This serial interface is compatible with series SV1000/2000/3000, VQC1000/2000/4000, S0700 and the new SY series valves.

Box 26640, Indianapolis, IN 46226 Tel: (317) 899-4440 FAX: (317) 899-3102 1978-2000 SMC Pneumatics, Inc. All Rights Reserved. April 2000

Manifold Regulator ARM1000/2000 Series ARJ Standard Specifications Fluid Proof pressure Maximum operating pressure Air 1.2 MPa 0.8 MPa Standard: 0.05 to 0.7 MPa 0.2 MPa setting 0.05 to 0.2 MPa 5 to 60C (No freezing) Air 0.02 MPa Relieving type AR425 to 935 4 connection methods ARX Regulating pressure range AMR Ambient and fluid temperature Fluid Cracking pressure (Valve) Construction ARM

SI SI SMC PROFINET IO EX245 SI (1) IP65 (2) PROFINET IO (SCRJ) 2 (24V) 2 (3) 32 (4) 128 (5) 64 (6) 8 (7) (FSU) (8) CIRT (9) (MRP) (10) (11) (12) (13) SY3000 / 5000 / 7000 SV1000 / 2000 / 3000 VQC1000 / 2000 / 4000 / 5000 VSS8-2 / 8-4, VSR8-2 / 8-4 EX245 EX245-DX1 16 EX245-DY1 8 10 No.EX-OMU0020CN 1.2. 1.SI (EX245-SPN1) 2. (EX245-DX1) 3. (EX245-DY1) 5. 4.

3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1 (r.p.m)] Rotation speed [min-1 (r.p.m)] Note 1: Value when no pressure applied.

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.