Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

values) Specifications Bore size (mm) Item Bore size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 20 25 32 40 50 63 80 100 10 20 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Stroke length tolerance Piston speed 10-/11-: 30 to 400

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing) Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C Piston speed Stroke length tolerance +1.0 0 50 to 400 mm/s Mounting Grease Cleanliness class (ISO class) Basic/Double-side bossed/Single foot/Double foot/Rod flange/Head flange 10-/11-: Fluorine grease

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

3

300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

NCA1

R O D B O R E S I Z E 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 1000 10 1200 12 1400 14 E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Please consult SMC Customer Service for larger sizes.

REC

Air cushion Cushion Screw-in type Piping M5 x 0.8 Relief port size 50 to 400 mm/s Piston speed Mounting Basic style, Axial foot style, Rod side flange style Head side flange style Auto switch can be mounted.

Guide Table Series MGF ø40, ø63, ø100 1

m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70 kg, eccentric distance is 60 mm, and the maximum speed is 150

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

In order to maintain the particulate generation grade, use operation of 500 thousand cycles or travel distance of about 400 km as a standard. (Graph (1) below) If operation is continued beyond the recommended values, lubrication failure of the linear guide and loss of particulate generation characteristics may occur. 1.

Filter Regulator IW Series

200 500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate

Peltier-type Chiller Thermo-con/ Compact Type

For details, refer to the optional accessory (page 11). 6 HEF Series Cooling Capacity Circulating fluid: Water, Flow rate: 1 L/min Circulating fluid: Water, Flow rate: 1 L/min, When constant fan speed mode is selected 600 600 500 500 Cooling capacity [W] Cooling capacity [W] Ambient temperature 25C 400 400 Ambient temperature 25C 300 300 200 200 Ambient temperature 35C Ambient temperature

Miniature Regulator

500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) ARP Pressure Characteristics (Representative Values) IR-A IR Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate Q = 20 L/min (ANR) 0.30 IRV Outlet pressure (MPa) 0.25 Set point VEX 0.20 SRH SRP 0.15 SRF 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

HRX-OM-Y098

: 400 VAC, (7) Piping length: Minimum 5 With the pressure control mode that controls the pressure automatically with the inverter.If the pressure control mode is not necessary,use the flow control function or the pump output setting function. 6 Required flow rate to maintain the cooling capacity.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

HRX-OM-W032

fluid flow rate: Rated flow rate (4) Power supply: 400 VAC(50Hz)/460 VAC(60Hz) 5: (1) Ambient temperature: 32 oC, (2) Circulating fluid: Clean water, (3) Circulating fluid temperature: 20 oC, (4) Load: Refer to the cooling capacity shown in the specification table, (5) Circulating fluid flow rate: Rated flow rate, (6) Power supply: 400 VAC(50Hz)/460 VAC(60Hz) (7) Piping length: Minimum 6

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

air-filter-e

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.