SMC Corporation of America
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empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

(25 ) No.4-40 UNC (32 ) 8 (2 /) 16 () DC24 V Class22 A () DC24 V Class22 A 0.5 A/ 2 A/ 0.081.5 mm 2 (AWG1628) 50 mA IP67 () 2 IP40 () -1050 3 -2060 3585RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 300 g 300 g 300 g 1M12 (4 ) 2 3UL 050 -42No.EX-OMN0035CN-A (EX600-DYB) 0 1 2 3 2 Bit 1 Bit 3 Bit 5 Bit 7 4 Bit 0 Bit 2 Bit 4 Bit 6 (EX600-DYE) 1 2 3 4 5 6 7

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x

MK(2) b) Type B mounting (When using the cylinder tube threads) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B E t E t C J G5-S Compatible Mounting Bolt Dimensions CV Model Type A mounting Type B mounting E (mm) D: Bolt length (mm) C (mm) Mounting bolt size Mounting bolt size MVGQ MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB28-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB28-D 8 to 11 M3 x

Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250

Series Variations Applicable auto switch models Standard variations Lock system Standard stroke (mm) Bore size (mm) Solid state switch Reed switch Type Model Action Series Built-in auto switch magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

(Length 300 mm) Without lead wires Without connector Misc.

D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9