Ionizer

12 12 1 5 4.8 Static Neutralization Equipment Connection cable B (6P)/IZS31-CR 230 +60 0 1 1 Alphabetical Index Length Measuring/ Counter 6 6 Sensor bracket/IZS31-BL 4 x 4.5 20 14 48 35 10 84 20 4.5 100 34 663 A Series IZS31 Made to Order 1 Please contact SMC for detailed dimensions, specifications, and lead times.

VZ100/300/500

M5 x 0.8 b Cv b Cv VV3Z1-01-1 VV4Z1-20-1 1/8 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no.

Slider Type/Ball Bushing Bearing

1 o !2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

ZX

(For replacement) How to order (1) Valve unit (Supply valve: N.C.) (For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)

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B ZZ -t2 xstrokes.1 12 + 2X!

LECA6_C

A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2-Color Display Digital Flow Switch RoHS *1 Applicable fluid Dry air, N2, Ar, CO2 *1 For the PF2M7-L A wide range of flow measurement is possible with 1 product. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

Series VQ Metal Seal/Rubber Seal Body Ported

lever style B C Note 1) See p.1.10-34for AC.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

bolt * 20MSU_018.eps A port B port 2-M3 x 0.5 24 1 (Port position: Side port type only) 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Thermo-con/Rack Mount Type

Signal contents N 100-240 VAC L 100-240 VAC E PE 1. Power supply connector IEC60320 C14 (or equivalent) N L 8 7 6 5 4 3 2 Pin no. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 E 2.

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 1 4 5 32 5 16 5 16 One-touch fitting One-touch fitting 6, 10 KM11 3 8 1 2 1 4 One-touch fitting 3 8 NPT NPT NPT thread 6, 10 KM12 Applicable Tubing Tube material Tube O.D.

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Adapter B Ejector indication Nozzle dia./1.8, 2.0 mm ZR1-W 1 18 20 2 1 1 1 1 1 (Mounting hole) Silencer Adapter E Spacer B (Mounting hole) Rc 1/8 V port (Vacuum port) 1 M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

AC Servo Motor Driver (SSCNET /H Type)

) 1 1150n 10:10 times 100:100 times 1000:1000 times (Note 1) LECSS2-T sets [4194304] (Note 2) Axis No.-1 Pr.1 Unit setting Set the unit used for defining positioning operations.

CNG

(Example) CDNGLN40-100-D Applicable Auto Switch/ Refer to page 9-15-1 for further information on auto switches.

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.