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P1 (P3) P2 (P4) P1 (P3) P2 (P4) Pressure low Pressure high Vacuum low Vaccum high Pressure low Pressure high Vacuum low Vacuum high Filter gasket (ZX1-FG) : Hysteresis mode (same as for positive pressure use) When the value of hysteresis is set to 2 digits or less, the switching output might chatter due to fluctuation of the input pressure around its set point.

Port P1 P2 P2 P1 P2 Port P1 Pressure is applied Operating direction P1 Pressure is applied Operating direction P2 Pressure is applied P2 Pressure is applied 1486 Magnetically Coupled Rodless Cylinder 3-Options available for stroke adjustment Bumper bolt (resin tipped) Bumper bolt (Same on the opposite side) Shock absorber + Adjustment bolt (metal ended) Adjustment bolt (Same on the opposite

Pilot solenoid valve 630 VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Dimensions Pg9 Applicable cable O.D. 6 to 8 Pilot EXH port 10(P2) Silencer installed (Standard) EBKX-L7004-040: VNH1, VNH2 AN210-02: VNH3, VNH4 Light/surge voltage suppressor (For DZ) Pilot SUP port 12(P1) Manual override (Non-locking push type) N P2 P1 Main port 1 (Back side port 2) U: Female thread for bracket

ISE When thevalues of Pt and P2 are the same or when PI >P2 within 3 digits, the hystereSIS Will be automatically 3 digits for the set value of Pt .

ISE When the values of P I and P2 are equal or when Pi > P2 but wnhln .3 dig ~ 5 , the hysteresis will be automatically sel 10 3 digits for the sel value of Pi eWlndow comparator mode I ZSE . ThE! hystereSIs IS 2 digil!., so separale Pi from P2 by 5 digits or more When programming. ISE The hysleP2 by 7 digits or more when programming.

tubing 6/4 Y C Q V BB W K H IN OUT IN OUT Z P2 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) Plate thickness 10-/21-AW30K-B: Max. 3.5 10-/21-AW40K-B: Max. 5 B Hexagon width across flats 17 Clearance for maintenance G 1/4 Drain E CC A AW60K-B 1021S N T D J J M U Applicable tubing 6/4 R C Q BB K H IN OUT P2 Pressure gauge (Option) 2 x P1 (Port size) (Pressure gauge

) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4 5 , 6 7 8 9 10 11 P2N.C

LCDON LCDOFF 44 11-1 11-1-1 P1 P2 () P39 Err9( 9 P4 P5 kg cm)r MPa 4 <>40 20kg 0.Pa 20 440.5 100031.830 4 P6 P7 10ms 9.99sec () (, ON ON P8Err12 * *10msec 9.99sec *() (, * 11-1-2 PRESET " PRG STEP P1 " P1 1000.0 " " 45 WRITE READ UPDOWN LEFTRIGHT WRITE 1 PRG STEP P1 1000.0 " " " " UP 1000.0 DOWN RICHT LEFT 2P2 P2 () 9.9mm PRG STEP P2 1.0 " " " " <> 1.0 1.0

22 40 36 0.72 31 31 55 45 Effective area at exhaust side (mm2) (2) S at P2 = 0.5 MPa Note 1) Set within the operating pressure range of solenoid valve.

P-D()14.2 2. 14.1 3. 4.8.3 4. 4.10 4 4 4 (3) LECSC-AC100120V ON OFF RA MC MC SK NFB MC CNP1 L1 AC100120V CNP3 (5) U 2 U V 3 L2 V M W 4 N W 1 P1 (1) P2 PE CNP2 P (2) C D (3) CN2 L11 L21 CN6 CN6 DC24V DOCOM EMG (4) DOCOM DICOM (4) ALM RA 1. P1-P2() 2.

= 0.5 MPa P R A 33 75 29 0.4 P R B 64 33 28 0.3 Effective area at exhaust side [mm2] S at P2 = 0.5 MPa A R EA 36 75 78 0.2 B R EB 68 38 69 0.1 Note 1) Set the pressure within the operating pressure range of the valve.

) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation

*2P.26 7-3-6 35 9. 9-1 9-1-1 P1 P2 P3 9 Err99 P4 P5 Pa N m)D 4 <>40 (0.04200N 5Pa 0.5MPa 510 5 10031.830 200 0.040.043.14510 4 P6 READWRITEEND P7 (t1) 10ms 9.99sec (t1) () ON t1ON P8Err12 * * 10ms 9.99sec * t * 9-1-2 PRESET " " " PRG STEP P1 " P1 1000.0 36 WRITE READ PRG STEP P1 " " " UPDOWN LEFTRIGHT WRITE UP 1 DOWN RICHT LEFT 2P2 PRG STEP P2 P2 "

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Vertical Operation P2 I II W A P1 a (c) (b) P0 P0 a W A (1) Speed is controlled by meter-out circuit. Using concurrently the meter-in circuit can alleviate the stick-slip. (1) Speed is controlled by meter-out circuit.

L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa 0.97MPa ,MPa ,MPa m/s m/