High Vacuum Angle Valve, XL Series

A cm Cylinder conductance With length L (cm) and diameter D (cm) where L>>D, from the formula C=(2RT/M)0.5D3/6L, the conductance C=12.1D3/L l/sec, at an air temperature of 20C. ON OFF Short pipe conductance From the Clausings factor K and the hole conductance C in the drawing below (Clausings factor drawing), the short pipe conductance CK is easily found as CK=KC.

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Multi-Axis Step Motor Controller

Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Size: 46 (42.5 O.D.), Display Pressure: P10 (1.0MPa, 150psi), Connection Thread: N02 (NPT 1/4), Clear Cover Material: Polycarbonate, Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X30 (Both MPa and psi)

Size: 46 (42.5 O.D.), Display Pressure: P10 (1.0MPa, 150psi), Connection Thread: N01 (NPT 1/8), Clear Cover Material: Polycarbonate, Attachment: C (Clear Cover Non Removable, Wrench Tighten), Option: X30 (Both MPa and psi)

Size: 42.5 O.D., Display Pressure: 1.0MPa, 150psi, Connection Thread: NPT 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Both MPa and psi

Size: 42.5 O.D., Display Pressure: 1.0MPa, 150psi, Connection Thread: NPT 1/8, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Non Removable, Wrench Tighten, Option: Both MPa and psi

Size: 42.5 O.D., Display Pressure: 1.0MPa, 150psi, Connection Thread: NPT 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Hand Tighten, Option: Both MPa and psi

Size: 42.5 O.D., Display Pressure: 1.0MPa, 150psi, Connection Thread: R 1/4, Clear Cover Material: Polycarbonate, Attachment: Clear Cover Removable, Hand Tighten, Option: Both MPa and psi

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: A (±1%F.S.), Port Size: 01 [R 1/8(w/M5 Female)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [Positive Pressure (0~1MPa)], Accuracy: ±2%F.S., Port Size: 01 [R 1/8(w/M5 Female)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: Voltage Output (1~5V) Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 0 [For Positive Pressure (0~1MPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: A (±1%F.S.), Port Size: 01 [R 1/8(w/M5 Female)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]