Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

HRX-OM-X037

[Tips] A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter. A set of thread adapters that converts the connections from Rc to G is enclosed as an accessory.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

CG5-S

Green (G) Green (G) Green (G) T0645 Color symbol -20 Black (B) Clear (C) Clear (C) 4.5 White (W) Orange (YR) Orange (YR) Black (B) Black (B) Black (B) White (W) White (W) White (W) T0806 Red (R) Red (R) Red (R) 6 8 TU0805 TU0805 Color symbol -20 Blue (BU) Blue (BU) Blue (BU) 8 8 5 5 Color symbol -100 Color symbol -20 Yellow (Y) Yellow (Y) Yellow (Y) Green (G) Green (G) Green (G) Black (B)

0.5

to 65C Ambient humidity Operating, Stored: 5 to 95%RH (No condensation) Weight 375 g (including AC cord, connector) IZF21 IZF31 Body 430 g 605 g Bracket 146 g 220 g Automatic cleaning unit 96 g 127 g Louver 33 g 58 g Filter 15 g 26 g Applicable standard/directive CE/cUL Functions and Indications No.

0.4

The electrical entry port {VQ1000: G 1/2, VQ2000: G 3/4} permits connection of conduit fittings.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

OMR0031

External Connection (P.20) for wiring. Refer to section 17.

ITV

Output pressure (kPa) G 20 0.5 0.5 Return PPA 40 0 0 Out AL 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (% F.S.) Input signal (% F.S.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX 2 2 21 01 1 G 1 1 1 G Normally Closed (N.C.)

LJ1H

20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard motor 90 92 Slider guide LJ1S Horizontal 94 Standard motor 96 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR specification 128 Construction 137 Mounting 140 Non-standard Motor Mounting 143 Deflection Data 145 Part Number Designations 100 F S 1 1 C G LJ1

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Most sensitive position Note 1) Operating load is an induction load.

MXQ

Standard Stroke Model Standard stroke (mm) 10, 20, 30, 40, 50 MXQ6 10, 20, 30, 40, 50, 75 MXQ8 10, 20, 30, 40, 50, 75, 100 MXQ12 10, 20, 30, 40, 50, 75, 100, 125 MXQ16 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ20 10, 20, 30, 40, 50, 75, 100, 125, 150 MXQ25 8-5-9 10 Series MXQ Theoretical Output IN OUT The dual rod ensures an output twice that of existing cylinders.

LV50-OMQ0002

RoHS Material of fluid contact parts PPSFKMC37 Port size 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) Weight(Body) *8 Approx. 340 g Approx. 400 g Approx. 520 g Approx. 680 g *1: Refer to page 66 [Applicable fluids list]. *2: 0L/min is displayed when the flow is less than zero-cut flow. *3: When fluids with high temperature are used, the available pressure range will be reduced.

MHZ2/MHZJ2

, 0.7MPa 0.6MPa, 0.7MPa 20 20 MHZ2/Standard 10 10 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm H H MHZ 2-20 MHZ 2-20 Gripping point 100 L 80 Pressure 0.2MPa 80 Pressure 0.2MPa Overhang H mm Overhang H mm 60 MHZJ2/With dust cover 60 0.6MPa 0.3MPa 0.7MPa 40 0.4MPa 0.5MPa 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.7MPa 40 20 20 0 20 40 60 80 0 20 40 60 80 100 Gripping point

10

8, and can be ordered by using the seal kit number corresponding to each bore size. * Seal kit includes a grease pack (32 to 50: 10 g, 63, 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed. Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) Set of the nos. !4, !5, !6, !

1

NCM Series CG1 Series CQ2 CQS NCA Bore size (mm) With rubber bumper With air cushion Standard type Bore size (mm) G G Th9 Th9 Rod side Head side Rod side Head side D0 0.043 0 0.043 1.5 12 1.5 15 15 20 (2.1) 5 4 3 3 0 0.052 0 0.052 16 1.5 1.5 20 20 25 (2.5) 5 4.5 3.5 3.5 -X 0 0.043 0 0.043 20 2 2 13 13 32 (3.3) 6 5 6 5 0 0.043 0 0.052 0 0.043 25 2 2 15 15 40 (3.9) 7 5 7 5 2032 2 21 50 (4.5

Ionizer

(Standard: 80 mm-pitch) Maintenance detection level selection switch KJH04-M5-X34 30 20 Position Detection Switch Flow Sensor Pressure Control Pressure Sensor Balance adjustment trimmer 14 19 20 16 Note) The maximum bar length is 1260 mm. The air purge nozzles are arranged at an 80 mm-pitch.

MXS

Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L/Symmetric style ZZ Z 0.5 22 24