-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit:
With cable (1.5 m) 2 to 24 2 to 24 P. 398 With cable (3 m) With cable (3 m) stations stations With cable (5 m) With cable (5 m) Terminal block box 2 to 20 stations Note 2) L kit (Serial transmission) kit (Circularconnector) S M kit (Lead wire) The valve is equipped with an indicator light and surge voltage suppressor, and the voltage is 24 VDC.
0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ) ZPY Pad dia.
0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.
-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating
A Water (Standard, Up to 60C) Air (Standard, Dry) Turbine oil Vacuum (Up to 1Torr) Carbon dioxide (CO2), Nitrogen gas (N2) Freon11, 113, 114 Steam Vacuum (Up to 10-3 Torr) Non-leak (10-5 atm cc/sec or less) High temperature water High temperature oil Argon, Helium Others (S, Q) (V, M) (V, M) (X, E, N, P) (D, N) R P N.O.
1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg
Clevis Pivot Bracket Pin (For CM2E(V)) Trunnion Nut/Material: Carbon steel (mm) (mm) H Material: Carbon steel B d D m m L2 C D t t L1 d Part no. Applicable bore size B C D d H TN-020B 20 26 28 25.5 M20 x 1.5 10 TN-032B 25, 32 32 34 31.5 M26 x 1.5 10 TN-040B 40 41 45 40.5 M32 x 2 10 Part no.
5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.
Non-rotating rod type Bore size Action 10 16 20 25 32 10 mm 16 mm 20 mm 25 mm 32 mm D Double acting Standard stroke (mm) 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40, 50 Built-in Magnet Cylinder Model If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.
Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) L1 = Q2 = M Q1 = M 10 X L1 max Q1 Size Y 3 M4 7 to 8 Y = 10 15 M4 7 to 14 X 3 Y 3.5 M5 8.5 to 9 L2 = 15 20 M5 8.5 to 18 X 3.5 Y 4 M6 10 X = 20 30 M6 10 to 20 X 4 Y 5 M8 13 30 40 M8 13 to 22 X 5 Y 6 M10 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.
Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) L1 = Q2 = M Q1 = M 10 X L1 max Q1 Size Y 3 M4 7 to 8 Y = 10 15 M4 7 to 14 X 3 Y 3.5 M5 8.5 to 9 L2 = 15 20 M5 8.5 to 18 X 3.5 Y 4 M6 10 X = 20 30 M6 10 to 20 X 4 Y 5 M8 13 30 40 M8 13 to 22 X 5 Y 6 M10 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.
Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) L1 = Q2 = M Q1 = M 10 X L1 max Q1 Size Y 3 M4 7 to 8 Y = 10 15 M4 7 to 14 X 3 Y 3.5 M5 8.5 to 9 L2 = 15 20 M5 8.5 to 18 X 3.5 Y 4 M6 10 X = 20 30 M6 10 to 20 X 4 Y 5 M8 13 30 40 M8 13 to 22 X 5 Y 6 M10 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.
Fitting for Nylon Tubing, Soft Tubing: M-01A-4/-6 Weight (g) 6.4 6.6 6.5 6.7 Effective area (mm2) 2.1 4.0 2.1 4.0 Applicable tubing Model A B C M-01AN-4 M-01AN-6 M-01AU-4 M-01AU-6 16 18 16 18 5 7 5 7 1.8 2.5 1.8 2.5 Nylon tubing Soft tubing Width across flats 10 Hose Nipple: M-01H-4/-6 Effective area (mm2) Weight (g) Model A B C D E Width across flats 10 19.5 20.5 8.5 9.5 1.8 3 6.5 8.5 7
-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit:
1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB
1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB
A water-resistant type cylinder is recommended for use in an environment which requires water resistance. Lead wire length symbols: 0.5 m Nil (Example) M9NW 3 m L (Example) M9NWL 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.
Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.
Maximum value for the LAT3-10: 10 [m]) The minimum values vary depending on the movement mode as described below. Minimum value in REL operation: Card Motor stroke [m] x -1 (e.g. Minimum value for the LAT3-10: -10 m) Minimum value in ABS operation: 0 Note 2: Refer to the following examples for how to set the pushing speed.