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Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -28- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including

(P) Male thread type A T L H L (mm) T Connection male thread Weight g Effective area mm L Min. bore A Body size H Width across flats Model L KK3P-01MS R 1/8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37 14 -02MS R 1/4 20.2 34.2 40.2 1/4 25.2 -03MS 9 R 3/8 50.9 32.5 35.7 42.2 17 -04MS R 1/2 57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

stations maximum) Number of ejector/valve stations Alignment (for special specifications) n r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

(Blanking plate) Rc G NPT NPTF Nil F N T Common exhaust Valve stations VV317-02-051-02 A port size (Base piping) 1/4 02 2 stations Symbol Passage Porting specifications A Side R P Common Common 3 Side Individual Common 20 20 stations Symbol Max. 20 stations 1 VV317-02-053-02 Individual exhaust Manifold Specifications Manifold type Max. number of stations Applicable solenoid valve B mount

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

IDX-OM-V020 Original Instructions PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFA60-23-A,C,L,R,T,V IDFA70-23-A,C,L,R,T,V IDFA80-23-A,C,L,R,T,V IDFA90-23-A,C,L,R,T,V This manual is intended to explain the installation and operation of the product.

This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

T 03 27 Flow rate range Unit specifications T Temperature range 04 20 40 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 0 to 90C With unit switching function Note1) Nil M Lead wire (Refer to page 322.)

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8

Contents Action 12 12 CQSB12-S-PS CQSB12-T-PS 16 16 CQSB16-S-PS CQSB16-T-PS Single actng, Spring return Single acting, Spring extend Set of nos. above !2, !3, !4 Set of nos. above !3 20 20 CQSB20-S-PS CQSB20-T-PS 25 25 CQSB25-S-PS CQSB25-T-PS Seal kit includes !3. Order the seal kit, based on each bore size. Seal kit includes !2, !3, !4.

bar Preset Pressure Range 0~975 0~142 0~0.98 0~9.9 0~9.8 CIRCUIT AND E L E C T R I C A L CONNECTION S E T T I N G INSTRUCTIONS H O W T O P R E S E T P R E S S U R E S W I T C H: K e e p p re s s i n g t h e p u s h b u t t o n ( 1 ) S E T a n d tur n the pressure set trimmer (3) P.SET and f i g u r e s a r e s h o w n o n t h e p r e s s u r e d i s p l a y board (4) LCD.

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

(or'Iond( .98 20 2,500 t,700 4,200,000 q 0 4J.30 25.10 ADA755 t _ ( 0 r t 0 n 0 t .98 2,500 t,400 4.600.000 10.6 49.35 21.t0 ADA75(} T . ( o r T o n d ( .98 24 2,500 t,200 4,900,000 |.5 53.35 29.10 ADA765 t _ t 0 r r 0 n 0 t .98 26 ?,500 r.000 5.31)0,000t2.l 57.35 31.10 ADA''O L t 0 f l 0 n 0 t .98 28 ?,500 900 5.600,000 1?.

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310