XM, XY Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310
SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.
(Metal Body) Series AS-M Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !
w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.
Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.
Bore (mm) 12 16 20 25 Stroke range (mm) W/o auto switch With auto switch A 40.5 41.5 51 57.5 CD CT CU CW CX CZ L L1 RR CL 39.5 40.5 52 57.5 B 22 22 29.5 32.5 A 45.5 46.5 61 67.5 CL 34.5 35.5 42 47.5 B 17 17 19.5 22.5 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 15.5 18.5 22.5 6 6 9 10 5, 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets
Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer
Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm
2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !
(mm) 20 25 14 10 4 14 10 10 6 22.5 10 8 [10.5] 6 -X 25 27 16 11 6 16 12 11 7 24.5 12 10 [12.5] 7 20Auto switch model D-F9BAL Data Symbol A B W HS Double Acting, Single Rod; Single Acting, Single Rod, Spring Return/Spring Extend 12 4.5 3.5 14.5 16.5 Bore size (mm) 16 5 3 15 18.5 20 9 6.5 11.5 22 25 10 8.5 9.5 24 Long Stroke 12 8 10 8 16.5 16 8.5 9.5 8.5 18.5 Bore size (mm) 20 12 15 3 22 25
e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.
t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !
{/s6ews tF2 = SPR0102 Ooubl Inlerlace Feg. w/icfsws +R3 = SPF0101 SinSle hlerlac Reg. w/98u9 0-60 PSI tR4 = SPRo101 Sinsl Interlace Feg. Vqauge G160 PSI T = Top wie oudel 1 sjngr sol-/+ring rturn I 2 oouble sol,/datntsd t 3Oouble Sol,/sprhg cenlded t (alr Fds blockd in ndbau 4. Doublo Sol./sPdng c6ntsrd t (cy'por6 opn io exhausi in n6uttaD.
NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.
NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.
Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQmA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40, 50 Symbol Functional option Nil Without functional option 1 With buffer 2 With end lock 3 Axial piping 4 With buffer, end lock 5 With
Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.
1 t LEM e Motor type*1 r Lead [mm] q Accuracy LEY Symbol Type Output [W] Actuator size Compatible driver*2 Nil Basic type H High precision type Symbol LEJS40 LEJS63 A 16 20 B 8 10 LES S2 AC servo motor (Incremental encoder) 100 40 LECSA-S1 w Size S3 AC servo motor (Incremental encoder) 200 63 LECSA-S3 LEPY LEPS t Stroke [mm]*3 40 63 S6 AC servo motor (Absolute encoder) 100 40 LECSB-S5 LECSC-S5
CAT.ES20-156 A Compact Low Friction Cylinder (Metal Seal Type) Series MQQ 10, 16, 20, 25, 28 Lateral Load Resisting Low Friction Cylinder (Metal Seal Type) Series MQM 6, 10, 16, 20, 25 Series MQM Series MQQ eds spe ow ds d l spee an rm rict w f ion c lo igh ifo act ylind un er f mp or o h Co w t Q lo MQ or isti ng lo res ad w frictio r f l lo de lin n cy era Lat M MQ Low Friction Cylinder