High Purity Fluoropolymer

C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Vacuum System Peripherals:

Series ZM 13-14-20 4.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

Table of Contents

For replacement parts, refer to page 2-4-103. 2-4-9 10 Series VQ1000 Body Ported Plug-in Unit: Flip Type Model Response time (2)(ms) Flow characteristics Weight (g) Number of solenoids Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Series Standard: 1 W Low wattage: 0.5 W H: 1.5 W AC C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VQ1130 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

LG1H

Stainless steel Nil W X10 Non-standard motor Frame material Guide type None B contact specification 2 pcs.

MXS Series Air Slide Table

Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58

SMC Pneumatic Clean Series

15 LH LT 2-LC (Knock pin position) 4-LD W W X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS Carbon steel i Lock piston Hard chrome plated, Heat treated Carbon steel o With Double End Lock MGP Lock bushing Zinc bronze die cast !0 Lock spring CBM2-20-PS-W Order No. CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W Zinc chromated Steel wire !1 MGQ Bumper Urethane Alloy steel The seal kit is a set of @6 and @7.

MXW Series Long Stroke Slide Table

} L3=50 {mm} L2=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

3 w !0 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

Thermo-chiller

Applicable model Dimension in [mm] A B C HRS100/150-A-20/40-A 32.7 [830] 11.9 [302] 61.1 [1552] HRS100/150-W-20/40-A 22.4 [570] 15.8 [401] 53.5 [1353] C 118 A B Option symbol With Earth Leakage Breaker B HRS 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit, over current or electrical leakage.

CL

140 160 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 Up to 1400 Up to 1400 Up to 1400 501 to 800 601 to 1000 601 to 1000 751 to 1000 751 to 1000 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1400 30 to 1400 30 to 1400 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) FV GA GB GC J H1 K KA M M1 P MM N S W H ZZ e f h ZZ l 59 66

RHC

2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 CX 500 9.5 0 1,000 2,000 3,000 CY Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 MQQ M 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3/8, 16 3/8

CLQ

MLU Locked A LOCK ML1C 40 to 100 20 to 32 W LOCK DLOCK Retraction locking -X 20Unlocked Data 40 to 100 20 to 32 W Simple Construction/Simple and reliable locking type A Locked Unlocked B Brake spring Wide Size Variations from 20 to 100 Lock ring Piston rod Standard stroke (mm) Locking direction Bore size (mm) FREE Series Mounting Load direction 5 10 15 20 25 30 35 40 45 50 75 100 LOCK 20

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1