Table of Contents

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

4/5 Port Air Operated Valve Series SYJA3000

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

VM

3 Rubber t POM End cover !4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

CLS

Symbol Bore size (mm) 125 140 160 180 200 250 H A H A L1 H1 Y type double knuckle I type single knuckle 3.5 Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 Y-18 135 63 125 193.5 I-18 Y-20 135 63 125 193.5 I-20 L1 H1 Y-25 160 71 160 245.5 I-25 A, H Dimensions when Mounting a Single/Double Knuckle Joint together with a Rod End Nut Courtesy of Steven Engineering

Basic Type/Direct Mount Type

2 r CY3R6 @3 @7 o u y t @8 !9 @2 18a CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t !9 @2 18a CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 @2 @3 @5 @8 @7 o u !7 t 18a CY3R15, 20 CY3R15 Component Parts No. Description Body End cover A End cover C End cover B End cover D Cylinder tube No.

CQS

Rod end male thread 20, 25 Rod end nut Rod End Male Thread Bore size (mm) 12 16 20 25 L1 X C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 10.5 15.5 12 18.5 14 22.5 17.5 Basic Style A B A B Without auto switch With auto switch Bore size (mm) Stroke range (mm) 5ST C I N OB D K OA RA E L RB F M T H 10ST 5ST 10ST 5ST 10ST 5ST 10ST 12 16 20 25 M3 x 0.5 15.5 M4 x 0.7 6 8 7 12 32 38

Compressed Air Preparation Filter

AD27-2-A AD37m-2-A AD47m-2-A With level gauge AD37m-8-A AD47m-8-A Normally open (N.O.) AD38m-2-A AD48m-2-A With level gauge AD38m-8-A AD48m-8-A Automatic (Auto drain) The bowl assembly for sizes 20 to 40 comes with a bowl seal. The bowl assembly for sizes 50 and 60 comes with a flange and a bowl seal.

Refrigerated Air Dryers

11) [opposite side] IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Air Slide Table

A) MXQ12B 50 28 20 27 18 MXQ20(A) MXQ16B 57 31 20 30 19 MXQ25(A) MXQ20B 64 32 21 31 20 -X11 is not available for the MXQ6(A, B) and MXQ8(A, C).

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

T

Fixed end Burst pressure (MPa) Min. bending radius (mm) Note) 10 15 20 27 35 Air: 20 to 60C, Water: 0 to 40C (No freezing) Operating temperature Polyurethane Material Note) The minimum bending radius indicates the value at which the tubing will fold at a temperature of 20C. At a higher temperature, the tubing may fold at more than the minimum bending radius.

MB1

7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

MQQ

79 6.6 8 42 52 20 FX FT 10 to 50, 75, 100 106.5 84.5 5.5 8 48 56 25 B + Stroke L FZ 10 to 50, 75, 100 126 104 5.5 8 54 62 28 2-FD A + Stroke 25, 28 Bore size (mm) FZ L M 55 18 10 60 20 16 FV 64 20 20 65 22 34 25 72 22 FT 40 28 FX B + Stroke L FZ A + Stroke 4-FD Rear flange type/MQQLG 10, 16, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ1E Union tee LQ1T Panel mount union LQ1P Union LQ1U Union elbow A A B A A 15 A B B B B 20 A 25 A Note 1) For each body class, the second and later numbers or symbols indicate reducing. However, in case of size 1, the tubing cannot be changed by reducing. Note 2) Sizes 1 to 3 are not available for the union flange Note 3) For Union flange, nut sizes 4 and 5 are as shown below.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Rotary Table/

, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 High Precision Type A F9B MSQ A 10 MSQ B 10 A F9B Basic Type Number of auto switch 2 pcs. 1 pc. n pcs.

Plug-in Unit

A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec.