SMC Corporation of America
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VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 0.1 0.3 NX + 0.2 0 A1 U1 RE

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

(AC24V) t t t t t Non plug-in type Manifold stations us. Efectiae Orifice Area (Cu-Factor) Porting/No. of stations First station I Fifth station Tenth station Fifteenth station P-A or B 0.72 0.72 0.71 0.70 A-EA, B.EB 0.9 0.9 0.9 2 position sjngle.

(AC24V) t t t t t Non plug-in type Manifold stations us. Efectiae Orifice Area (Cu-Factor) Porting/No. of stations First station I Fifth station Tenth station Fifteenth station P-A or B 0.72 0.72 0.71 0.70 A-EA, B.EB 0.9 0.9 0.9 2 position sjngle.

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

Analog In An Analog input value from a System Input (A01, A02, A03, ... A08) FB Value An analog value contained in a Function Block (T, t, N, n, Direct set, etc.) Word Comparison a 16 bit output value from a Function Block 6.1 Boolean Function Block It is possible to express the Logic functions in the form of an equation.

Operation stop Combination Symbol: D1 Combination Symbol: D4 An N.C. solenoid valve is used for the vacuum release valve. An external supply valve must be provided. An external valve must be provided to serve as the supply valve. An air operated N.C. valve is used for the vacuum release valve.

T T Unit: N.m Cylinder stroke (mm) Bore size (mm) 5 10 100 40 45 50 75 15 20 25 30 35 12 0.11 0.10 0.08 0.07 0.07 0.06 16 0.15 0.12 0.11 0.10 0.09 0.08 20 0.19 0.18 0.17 0.16 0.37 0.32 0.28 0.25 0.23 0.21 25 0.21 0.20 0.18 0.17 0.40 0.35 0.31 0.28 0.25 0.23 32 0.25 0.20 0.39 0.36 0.34 0.32 0.66 0.59 0.53 0.49 0.45 0.42 40 0.43 0.36 0.65 0.61 0.58 0.55 1.06 0.96 0.88 0.81 0.75 0.70

11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 Applicable cylinder Applicable cylinder 4.5 67.3 12 5 (Max. 16.5) 70 RB1412 3.5 46.7 7 5 (Max. 16.5) 60 RB1007 5.5 73.2 15 8 (Max. 20) 90 RB2015 6 4.5 67.3 12 8 (Max. 20) 74 RB1412 5.5 73.2 15 9 (Max. 25) 100 RB2015 4 4.5 67.3 12 9 (Max. 25) 94 RB1412 1194 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Side Supports Side

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and