Thermo-chiller/Rack Mount Type

024 030 HRR -W HRR010-W-20 30 20 Facility water flow rate [L/min] Facility water flow rate [L/min] HRR030-W 25 15 HRR024-W 20 15 10 10 HRR018-W 5 5 HRR012-W 0 0 0 10 20 30 40 0 10 20 30 40 50 Facility water inlet temperature [C] Facility water inlet temperature [C] * This is the required facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the

V

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Aluminum alloy Aluminum alloy Carbon tool steel Description Cylinder tube Piston No. q w Bore size (mm) 12 16 20 25 32 40 50 63 No.

10

Contents 32 MBB32-PS-W 40 MBB40-PS 50 MBB50-PS 63 MBB63-PS 80 MBB80-PS 100 MBB100-PS 40 MBB40-PS-W 50 MBB50-PS-W 63 MBB63-PS-W 80 MBB80-PS-W 100 MBB100-PS-W Set of the nos. @9, #0, #1, #2, #3 Set of the nos. @9, #0, #1, #2, #3 * Seal kits consist of items @9 to #3, and can be ordered by using the seal kit number corresponding to each bore size. * Trunnion type should not be disassembled.

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Modular F.R.L. Unit

40 AW30, 40 AW20 AW30, 40 AW10 to 40 AW10 to 40 AW30, 40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z Note 5) Body size 10 20 30 40 Thread type Note 6) Metric thread (M5) Rc NPT G Nil N Note 1) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) F Note 2) Note 7) When more than one specification is required, indicate in alphanumeric order.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Table of Contents

No. q w e r t y u i o !

CNA

1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37

CNA

11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27

Slider Type Ball Screw Drive/11-LEFS Series

W [kg] Work load: W [kg] 50 20 40 Lead A 30 Lead A Lead H 10 20 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 40 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ The following graph shows the values when moving

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36

Table of Contents

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Glossary of Terms Specific Product Precautions 40 JSXM Series Construction JSXM20, 30, 40, Normally closed (N.C.) Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.